JPS62192643U - - Google Patents
Info
- Publication number
- JPS62192643U JPS62192643U JP7950486U JP7950486U JPS62192643U JP S62192643 U JPS62192643 U JP S62192643U JP 7950486 U JP7950486 U JP 7950486U JP 7950486 U JP7950486 U JP 7950486U JP S62192643 U JPS62192643 U JP S62192643U
- Authority
- JP
- Japan
- Prior art keywords
- cassette
- wafers
- transport means
- holding stand
- transfer device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 235000012431 wafers Nutrition 0.000 claims 7
- 238000000034 method Methods 0.000 claims 2
Landscapes
- Specific Conveyance Elements (AREA)
- Warehouses Or Storage Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7950486U JPS62192643U (sh) | 1986-05-28 | 1986-05-28 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7950486U JPS62192643U (sh) | 1986-05-28 | 1986-05-28 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62192643U true JPS62192643U (sh) | 1987-12-08 |
Family
ID=30929423
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7950486U Pending JPS62192643U (sh) | 1986-05-28 | 1986-05-28 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62192643U (sh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0348438A (ja) * | 1989-07-17 | 1991-03-01 | Tokyo Electron Sagami Ltd | 熱処理装置 |
-
1986
- 1986-05-28 JP JP7950486U patent/JPS62192643U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0348438A (ja) * | 1989-07-17 | 1991-03-01 | Tokyo Electron Sagami Ltd | 熱処理装置 |