JPH0184436U - - Google Patents
Info
- Publication number
- JPH0184436U JPH0184436U JP1987180479U JP18047987U JPH0184436U JP H0184436 U JPH0184436 U JP H0184436U JP 1987180479 U JP1987180479 U JP 1987180479U JP 18047987 U JP18047987 U JP 18047987U JP H0184436 U JPH0184436 U JP H0184436U
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor wafer
- tray
- storage plate
- frame body
- transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 6
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987180479U JPH0184436U (sh) | 1987-11-26 | 1987-11-26 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987180479U JPH0184436U (sh) | 1987-11-26 | 1987-11-26 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0184436U true JPH0184436U (sh) | 1989-06-05 |
Family
ID=31471997
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987180479U Pending JPH0184436U (sh) | 1987-11-26 | 1987-11-26 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0184436U (sh) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021118332A (ja) * | 2020-01-29 | 2021-08-10 | 株式会社ディスコ | 観察用治具 |
-
1987
- 1987-11-26 JP JP1987180479U patent/JPH0184436U/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2021118332A (ja) * | 2020-01-29 | 2021-08-10 | 株式会社ディスコ | 観察用治具 |
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