JPS62192638U - - Google Patents
Info
- Publication number
- JPS62192638U JPS62192638U JP8162986U JP8162986U JPS62192638U JP S62192638 U JPS62192638 U JP S62192638U JP 8162986 U JP8162986 U JP 8162986U JP 8162986 U JP8162986 U JP 8162986U JP S62192638 U JPS62192638 U JP S62192638U
- Authority
- JP
- Japan
- Prior art keywords
- cleaning
- cleaning tank
- wafer
- immerses
- pressurizes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 6
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000002253 acid Substances 0.000 claims 1
- 239000007788 liquid Substances 0.000 description 1
Landscapes
- Weting (AREA)
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8162986U JPS62192638U (ko) | 1986-05-28 | 1986-05-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8162986U JPS62192638U (ko) | 1986-05-28 | 1986-05-28 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62192638U true JPS62192638U (ko) | 1987-12-08 |
Family
ID=30933540
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8162986U Pending JPS62192638U (ko) | 1986-05-28 | 1986-05-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62192638U (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0223620A (ja) * | 1988-07-12 | 1990-01-25 | Mitsubishi Electric Corp | 洗浄装置 |
-
1986
- 1986-05-28 JP JP8162986U patent/JPS62192638U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0223620A (ja) * | 1988-07-12 | 1990-01-25 | Mitsubishi Electric Corp | 洗浄装置 |