JPS62192234U - - Google Patents

Info

Publication number

JPS62192234U

JPS62192234U JP8169286U JP8169286U JPS62192234U JP S62192234 U JPS62192234 U JP S62192234U JP 8169286 U JP8169286 U JP 8169286U JP 8169286 U JP8169286 U JP 8169286U JP S62192234 U JPS62192234 U JP S62192234U

Authority

JP

Japan

Prior art keywords

casing

pressure

semiconductor pressure

semiconductor

reference pressure

Prior art date

1986-05-27

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 239000004065 semiconductor Substances 0.000 claims description 7
• 238000001514 detection method Methods 0.000 claims description 5
• PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
• 229910052731 fluorine Inorganic materials 0.000 description 1
• 239000011737 fluorine Substances 0.000 description 1
• 239000011347 resin Substances 0.000 description 1
• 229920005989 resin Polymers 0.000 description 1
• 238000007789 sealing Methods 0.000 description 1