JPS62191874U - - Google Patents
Info
- Publication number
- JPS62191874U JPS62191874U JP1986079999U JP7999986U JPS62191874U JP S62191874 U JPS62191874 U JP S62191874U JP 1986079999 U JP1986079999 U JP 1986079999U JP 7999986 U JP7999986 U JP 7999986U JP S62191874 U JPS62191874 U JP S62191874U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- graphite
- members
- holder
- epitaxial growth
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986079999U JPH057248Y2 (enExample) | 1986-05-27 | 1986-05-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986079999U JPH057248Y2 (enExample) | 1986-05-27 | 1986-05-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62191874U true JPS62191874U (enExample) | 1987-12-05 |
| JPH057248Y2 JPH057248Y2 (enExample) | 1993-02-24 |
Family
ID=30930400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986079999U Expired - Lifetime JPH057248Y2 (enExample) | 1986-05-27 | 1986-05-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH057248Y2 (enExample) |
-
1986
- 1986-05-27 JP JP1986079999U patent/JPH057248Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH057248Y2 (enExample) | 1993-02-24 |