JPS62191867U - - Google Patents
Info
- Publication number
- JPS62191867U JPS62191867U JP7795286U JP7795286U JPS62191867U JP S62191867 U JPS62191867 U JP S62191867U JP 7795286 U JP7795286 U JP 7795286U JP 7795286 U JP7795286 U JP 7795286U JP S62191867 U JPS62191867 U JP S62191867U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- electrode side
- substrate
- rotating blade
- plasma
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 3
- 239000010409 thin film Substances 0.000 claims 2
- 239000012528 membrane Substances 0.000 claims 1
- 239000000376 reactant Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 2
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7795286U JPS62191867U (cs) | 1986-05-23 | 1986-05-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7795286U JPS62191867U (cs) | 1986-05-23 | 1986-05-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62191867U true JPS62191867U (cs) | 1987-12-05 |
Family
ID=30926445
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7795286U Pending JPS62191867U (cs) | 1986-05-23 | 1986-05-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62191867U (cs) |
-
1986
- 1986-05-23 JP JP7795286U patent/JPS62191867U/ja active Pending