JPS62190687U - - Google Patents

Info

Publication number
JPS62190687U
JPS62190687U JP7883386U JP7883386U JPS62190687U JP S62190687 U JPS62190687 U JP S62190687U JP 7883386 U JP7883386 U JP 7883386U JP 7883386 U JP7883386 U JP 7883386U JP S62190687 U JPS62190687 U JP S62190687U
Authority
JP
Japan
Prior art keywords
chamber
exhaust duct
indicator
box
detecting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7883386U
Other languages
English (en)
Japanese (ja)
Other versions
JPH044868Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7883386U priority Critical patent/JPH044868Y2/ja
Publication of JPS62190687U publication Critical patent/JPS62190687U/ja
Application granted granted Critical
Publication of JPH044868Y2 publication Critical patent/JPH044868Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Prevention Of Fouling (AREA)
  • Ventilation (AREA)
JP7883386U 1986-05-27 1986-05-27 Expired JPH044868Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7883386U JPH044868Y2 (enrdf_load_stackoverflow) 1986-05-27 1986-05-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7883386U JPH044868Y2 (enrdf_load_stackoverflow) 1986-05-27 1986-05-27

Publications (2)

Publication Number Publication Date
JPS62190687U true JPS62190687U (enrdf_load_stackoverflow) 1987-12-04
JPH044868Y2 JPH044868Y2 (enrdf_load_stackoverflow) 1992-02-12

Family

ID=30928139

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7883386U Expired JPH044868Y2 (enrdf_load_stackoverflow) 1986-05-27 1986-05-27

Country Status (1)

Country Link
JP (1) JPH044868Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH044868Y2 (enrdf_load_stackoverflow) 1992-02-12

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