JPS62190339U - - Google Patents
Info
- Publication number
- JPS62190339U JPS62190339U JP8058486U JP8058486U JPS62190339U JP S62190339 U JPS62190339 U JP S62190339U JP 8058486 U JP8058486 U JP 8058486U JP 8058486 U JP8058486 U JP 8058486U JP S62190339 U JPS62190339 U JP S62190339U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- main surface
- substrate support
- nozzle
- developing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000002347 injection Methods 0.000 claims 1
- 239000007924 injection Substances 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8058486U JPS62190339U (cs) | 1986-05-26 | 1986-05-26 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8058486U JPS62190339U (cs) | 1986-05-26 | 1986-05-26 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62190339U true JPS62190339U (cs) | 1987-12-03 |
Family
ID=30931519
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8058486U Pending JPS62190339U (cs) | 1986-05-26 | 1986-05-26 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62190339U (cs) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03148825A (ja) * | 1989-11-06 | 1991-06-25 | Ebara Corp | ジェットスクラバー |
-
1986
- 1986-05-26 JP JP8058486U patent/JPS62190339U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH03148825A (ja) * | 1989-11-06 | 1991-06-25 | Ebara Corp | ジェットスクラバー |