JPS62189598U - - Google Patents

Info

Publication number
JPS62189598U
JPS62189598U JP7750086U JP7750086U JPS62189598U JP S62189598 U JPS62189598 U JP S62189598U JP 7750086 U JP7750086 U JP 7750086U JP 7750086 U JP7750086 U JP 7750086U JP S62189598 U JPS62189598 U JP S62189598U
Authority
JP
Japan
Prior art keywords
processing chamber
heat generating
temperature heat
generating part
furnace body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7750086U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7750086U priority Critical patent/JPS62189598U/ja
Publication of JPS62189598U publication Critical patent/JPS62189598U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Devices For Post-Treatments, Processing, Supply, Discharge, And Other Processes (AREA)
  • Furnace Details (AREA)
JP7750086U 1986-05-22 1986-05-22 Pending JPS62189598U (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7750086U JPS62189598U (zh) 1986-05-22 1986-05-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7750086U JPS62189598U (zh) 1986-05-22 1986-05-22

Publications (1)

Publication Number Publication Date
JPS62189598U true JPS62189598U (zh) 1987-12-02

Family

ID=30925563

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7750086U Pending JPS62189598U (zh) 1986-05-22 1986-05-22

Country Status (1)

Country Link
JP (1) JPS62189598U (zh)

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