JPS62188771U - - Google Patents
Info
- Publication number
- JPS62188771U JPS62188771U JP1986077401U JP7740186U JPS62188771U JP S62188771 U JPS62188771 U JP S62188771U JP 1986077401 U JP1986077401 U JP 1986077401U JP 7740186 U JP7740186 U JP 7740186U JP S62188771 U JPS62188771 U JP S62188771U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- light
- shielding film
- photomask blank
- exposed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 8
- 239000000463 material Substances 0.000 claims 1
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- 239000005361 soda-lime glass Substances 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011651 chromium Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986077401U JPS62188771U (th) | 1986-05-20 | 1986-05-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1986077401U JPS62188771U (th) | 1986-05-20 | 1986-05-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62188771U true JPS62188771U (th) | 1987-12-01 |
Family
ID=30925372
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1986077401U Pending JPS62188771U (th) | 1986-05-20 | 1986-05-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62188771U (th) |
-
1986
- 1986-05-20 JP JP1986077401U patent/JPS62188771U/ja active Pending
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