JPS62188145U - - Google Patents

Info

Publication number

JPS62188145U

JPS62188145U JP7778086U JP7778086U JPS62188145U JP S62188145 U JPS62188145 U JP S62188145U JP 7778086 U JP7778086 U JP 7778086U JP 7778086 U JP7778086 U JP 7778086U JP S62188145 U JPS62188145 U JP S62188145U

Authority

JP

Japan

Prior art keywords

disk

wafer

generating means

electron generating

wafers

Prior art date

1986-05-22

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Pending

Links

• Espacenet
• Global Dossier
• Discuss

• 238000010884 ion-beam technique Methods 0.000 claims description 2
• 235000012431 wafers Nutrition 0.000 claims 4
• 239000007943 implant Substances 0.000 claims 1
• 150000002500 ions Chemical class 0.000 claims 1
• 230000001678 irradiating effect Effects 0.000 claims 1
• 238000005259 measurement Methods 0.000 claims 1
• 238000005468 ion implantation Methods 0.000 description 1