JPS62188139U - - Google Patents
Info
- Publication number
- JPS62188139U JPS62188139U JP7529886U JP7529886U JPS62188139U JP S62188139 U JPS62188139 U JP S62188139U JP 7529886 U JP7529886 U JP 7529886U JP 7529886 U JP7529886 U JP 7529886U JP S62188139 U JPS62188139 U JP S62188139U
- Authority
- JP
- Japan
- Prior art keywords
- processing gas
- supply system
- gas supply
- another processing
- another
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 239000007795 chemical reaction product Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7529886U JPS62188139U (es) | 1986-05-21 | 1986-05-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7529886U JPS62188139U (es) | 1986-05-21 | 1986-05-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62188139U true JPS62188139U (es) | 1987-11-30 |
Family
ID=30921306
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7529886U Pending JPS62188139U (es) | 1986-05-21 | 1986-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62188139U (es) |
-
1986
- 1986-05-21 JP JP7529886U patent/JPS62188139U/ja active Pending