JPS61136537U - - Google Patents
Info
- Publication number
- JPS61136537U JPS61136537U JP1786385U JP1786385U JPS61136537U JP S61136537 U JPS61136537 U JP S61136537U JP 1786385 U JP1786385 U JP 1786385U JP 1786385 U JP1786385 U JP 1786385U JP S61136537 U JPS61136537 U JP S61136537U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- gas supply
- plasma
- serves
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
- 239000000126 substance Substances 0.000 claims 1
- 239000002184 metal Substances 0.000 description 1
- 239000004005 microsphere Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1786385U JPS61136537U (es) | 1985-02-13 | 1985-02-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1786385U JPS61136537U (es) | 1985-02-13 | 1985-02-13 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61136537U true JPS61136537U (es) | 1986-08-25 |
Family
ID=30505965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1786385U Pending JPS61136537U (es) | 1985-02-13 | 1985-02-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61136537U (es) |
-
1985
- 1985-02-13 JP JP1786385U patent/JPS61136537U/ja active Pending