JPS62188138U - - Google Patents
Info
- Publication number
- JPS62188138U JPS62188138U JP7528286U JP7528286U JPS62188138U JP S62188138 U JPS62188138 U JP S62188138U JP 7528286 U JP7528286 U JP 7528286U JP 7528286 U JP7528286 U JP 7528286U JP S62188138 U JPS62188138 U JP S62188138U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- vacuum vessel
- ion source
- supplied
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010884 ion-beam technique Methods 0.000 claims description 2
- 238000005530 etching Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7528286U JPS62188138U (zh) | 1986-05-21 | 1986-05-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7528286U JPS62188138U (zh) | 1986-05-21 | 1986-05-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62188138U true JPS62188138U (zh) | 1987-11-30 |
Family
ID=30921275
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7528286U Pending JPS62188138U (zh) | 1986-05-21 | 1986-05-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62188138U (zh) |
-
1986
- 1986-05-21 JP JP7528286U patent/JPS62188138U/ja active Pending