JPS6218709U - - Google Patents
Info
- Publication number
- JPS6218709U JPS6218709U JP11056885U JP11056885U JPS6218709U JP S6218709 U JPS6218709 U JP S6218709U JP 11056885 U JP11056885 U JP 11056885U JP 11056885 U JP11056885 U JP 11056885U JP S6218709 U JPS6218709 U JP S6218709U
- Authority
- JP
- Japan
- Prior art keywords
- flow rate
- mass flow
- fluid
- control device
- temperature difference
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000012530 fluid Substances 0.000 claims description 3
- 238000001514 detection method Methods 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Measuring Volume Flow (AREA)
- Details Of Flowmeters (AREA)
- Flow Control (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11056885U JPS6218709U (en:Method) | 1985-07-19 | 1985-07-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11056885U JPS6218709U (en:Method) | 1985-07-19 | 1985-07-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6218709U true JPS6218709U (en:Method) | 1987-02-04 |
Family
ID=30989684
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11056885U Pending JPS6218709U (en:Method) | 1985-07-19 | 1985-07-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6218709U (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005531069A (ja) * | 2002-06-24 | 2005-10-13 | エム ケー エス インストルメンツ インコーポレーテッド | 圧力の揺らぎに鈍感な質量流量制御のための装置及び方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS596212B2 (ja) * | 1978-08-25 | 1984-02-09 | 文夫 碓井 | 強化合成樹脂管製造用加振圧入装置 |
-
1985
- 1985-07-19 JP JP11056885U patent/JPS6218709U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS596212B2 (ja) * | 1978-08-25 | 1984-02-09 | 文夫 碓井 | 強化合成樹脂管製造用加振圧入装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2005531069A (ja) * | 2002-06-24 | 2005-10-13 | エム ケー エス インストルメンツ インコーポレーテッド | 圧力の揺らぎに鈍感な質量流量制御のための装置及び方法 |