JPS62186971U - - Google Patents
Info
- Publication number
- JPS62186971U JPS62186971U JP7185986U JP7185986U JPS62186971U JP S62186971 U JPS62186971 U JP S62186971U JP 7185986 U JP7185986 U JP 7185986U JP 7185986 U JP7185986 U JP 7185986U JP S62186971 U JPS62186971 U JP S62186971U
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- forming apparatus
- film forming
- peripheral surface
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 claims description 5
- 239000000758 substrate Substances 0.000 claims description 5
- 239000004744 fabric Substances 0.000 claims description 4
- 239000010409 thin film Substances 0.000 claims 8
- 230000002093 peripheral effect Effects 0.000 claims 3
- 229920001410 Microfiber Polymers 0.000 claims 1
- 238000005289 physical deposition Methods 0.000 claims 1
- 229920006254 polymer film Polymers 0.000 claims 1
- 238000004804 winding Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7185986U JPS62186971U (cs) | 1986-05-15 | 1986-05-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7185986U JPS62186971U (cs) | 1986-05-15 | 1986-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186971U true JPS62186971U (cs) | 1987-11-27 |
Family
ID=30914793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7185986U Pending JPS62186971U (cs) | 1986-05-15 | 1986-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186971U (cs) |
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1986
- 1986-05-15 JP JP7185986U patent/JPS62186971U/ja active Pending