JPS6218652U - - Google Patents
Info
- Publication number
- JPS6218652U JPS6218652U JP10809785U JP10809785U JPS6218652U JP S6218652 U JPS6218652 U JP S6218652U JP 10809785 U JP10809785 U JP 10809785U JP 10809785 U JP10809785 U JP 10809785U JP S6218652 U JPS6218652 U JP S6218652U
- Authority
- JP
- Japan
- Prior art keywords
- rays
- photoelectrons
- utility
- emitted light
- model
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000428 dust Substances 0.000 claims description 4
- 238000001514 detection method Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims 3
- 235000012431 wafers Nutrition 0.000 claims 3
- 230000001678 irradiating effect Effects 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
Landscapes
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10809785U JPS6218652U (cs) | 1985-07-17 | 1985-07-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10809785U JPS6218652U (cs) | 1985-07-17 | 1985-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6218652U true JPS6218652U (cs) | 1987-02-04 |
Family
ID=30984972
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10809785U Pending JPS6218652U (cs) | 1985-07-17 | 1985-07-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6218652U (cs) |
-
1985
- 1985-07-17 JP JP10809785U patent/JPS6218652U/ja active Pending
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