JPS62186363U - - Google Patents
Info
- Publication number
- JPS62186363U JPS62186363U JP7269086U JP7269086U JPS62186363U JP S62186363 U JPS62186363 U JP S62186363U JP 7269086 U JP7269086 U JP 7269086U JP 7269086 U JP7269086 U JP 7269086U JP S62186363 U JPS62186363 U JP S62186363U
- Authority
- JP
- Japan
- Prior art keywords
- ion
- floor
- ion source
- downstairs
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims 1
- 238000010884 ion-beam technique Methods 0.000 claims 1
- 230000001133 acceleration Effects 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7269086U JPS62186363U (de) | 1986-05-16 | 1986-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7269086U JPS62186363U (de) | 1986-05-16 | 1986-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186363U true JPS62186363U (de) | 1987-11-27 |
Family
ID=30916365
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7269086U Pending JPS62186363U (de) | 1986-05-16 | 1986-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186363U (de) |
-
1986
- 1986-05-16 JP JP7269086U patent/JPS62186363U/ja active Pending