JPS62186362U - - Google Patents

Info

Publication number
JPS62186362U
JPS62186362U JP7368586U JP7368586U JPS62186362U JP S62186362 U JPS62186362 U JP S62186362U JP 7368586 U JP7368586 U JP 7368586U JP 7368586 U JP7368586 U JP 7368586U JP S62186362 U JPS62186362 U JP S62186362U
Authority
JP
Japan
Prior art keywords
pole piece
charged particle
particle beam
beam device
focusing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7368586U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0532927Y2 (US20020128544A1-20020912-P00008.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7368586U priority Critical patent/JPH0532927Y2/ja
Publication of JPS62186362U publication Critical patent/JPS62186362U/ja
Application granted granted Critical
Publication of JPH0532927Y2 publication Critical patent/JPH0532927Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Electron Beam Exposure (AREA)
JP7368586U 1986-05-16 1986-05-16 Expired - Lifetime JPH0532927Y2 (US20020128544A1-20020912-P00008.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7368586U JPH0532927Y2 (US20020128544A1-20020912-P00008.png) 1986-05-16 1986-05-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7368586U JPH0532927Y2 (US20020128544A1-20020912-P00008.png) 1986-05-16 1986-05-16

Publications (2)

Publication Number Publication Date
JPS62186362U true JPS62186362U (US20020128544A1-20020912-P00008.png) 1987-11-27
JPH0532927Y2 JPH0532927Y2 (US20020128544A1-20020912-P00008.png) 1993-08-23

Family

ID=30918236

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7368586U Expired - Lifetime JPH0532927Y2 (US20020128544A1-20020912-P00008.png) 1986-05-16 1986-05-16

Country Status (1)

Country Link
JP (1) JPH0532927Y2 (US20020128544A1-20020912-P00008.png)

Also Published As

Publication number Publication date
JPH0532927Y2 (US20020128544A1-20020912-P00008.png) 1993-08-23

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