JPS62186361U - - Google Patents

Info

Publication number
JPS62186361U
JPS62186361U JP7417986U JP7417986U JPS62186361U JP S62186361 U JPS62186361 U JP S62186361U JP 7417986 U JP7417986 U JP 7417986U JP 7417986 U JP7417986 U JP 7417986U JP S62186361 U JPS62186361 U JP S62186361U
Authority
JP
Japan
Prior art keywords
deflection
magnetic poles
charged particle
particle beam
orthogonal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7417986U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7417986U priority Critical patent/JPS62186361U/ja
Publication of JPS62186361U publication Critical patent/JPS62186361U/ja
Pending legal-status Critical Current

Links

JP7417986U 1986-05-17 1986-05-17 Pending JPS62186361U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7417986U JPS62186361U (enrdf_load_stackoverflow) 1986-05-17 1986-05-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7417986U JPS62186361U (enrdf_load_stackoverflow) 1986-05-17 1986-05-17

Publications (1)

Publication Number Publication Date
JPS62186361U true JPS62186361U (enrdf_load_stackoverflow) 1987-11-27

Family

ID=30919159

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7417986U Pending JPS62186361U (enrdf_load_stackoverflow) 1986-05-17 1986-05-17

Country Status (1)

Country Link
JP (1) JPS62186361U (enrdf_load_stackoverflow)

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