JPS62186354U - - Google Patents
Info
- Publication number
- JPS62186354U JPS62186354U JP7268686U JP7268686U JPS62186354U JP S62186354 U JPS62186354 U JP S62186354U JP 7268686 U JP7268686 U JP 7268686U JP 7268686 U JP7268686 U JP 7268686U JP S62186354 U JPS62186354 U JP S62186354U
- Authority
- JP
- Japan
- Prior art keywords
- filament
- utility
- model registration
- long linear
- ion source
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7268686U JPS62186354U (ru) | 1986-05-16 | 1986-05-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7268686U JPS62186354U (ru) | 1986-05-16 | 1986-05-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62186354U true JPS62186354U (ru) | 1987-11-27 |
Family
ID=30916357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7268686U Pending JPS62186354U (ru) | 1986-05-16 | 1986-05-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62186354U (ru) |
-
1986
- 1986-05-16 JP JP7268686U patent/JPS62186354U/ja active Pending