JPS6218622U - - Google Patents

Info

Publication number
JPS6218622U
JPS6218622U JP11031385U JP11031385U JPS6218622U JP S6218622 U JPS6218622 U JP S6218622U JP 11031385 U JP11031385 U JP 11031385U JP 11031385 U JP11031385 U JP 11031385U JP S6218622 U JPS6218622 U JP S6218622U
Authority
JP
Japan
Prior art keywords
flow path
mass flowmeter
sensor
thermal mass
sensing element
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP11031385U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0350426Y2 (US06168655-20010102-C00055.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11031385U priority Critical patent/JPH0350426Y2/ja
Publication of JPS6218622U publication Critical patent/JPS6218622U/ja
Application granted granted Critical
Publication of JPH0350426Y2 publication Critical patent/JPH0350426Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Measuring Volume Flow (AREA)
JP11031385U 1985-07-17 1985-07-17 Expired JPH0350426Y2 (US06168655-20010102-C00055.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11031385U JPH0350426Y2 (US06168655-20010102-C00055.png) 1985-07-17 1985-07-17

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11031385U JPH0350426Y2 (US06168655-20010102-C00055.png) 1985-07-17 1985-07-17

Publications (2)

Publication Number Publication Date
JPS6218622U true JPS6218622U (US06168655-20010102-C00055.png) 1987-02-04
JPH0350426Y2 JPH0350426Y2 (US06168655-20010102-C00055.png) 1991-10-28

Family

ID=30989218

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11031385U Expired JPH0350426Y2 (US06168655-20010102-C00055.png) 1985-07-17 1985-07-17

Country Status (1)

Country Link
JP (1) JPH0350426Y2 (US06168655-20010102-C00055.png)

Also Published As

Publication number Publication date
JPH0350426Y2 (US06168655-20010102-C00055.png) 1991-10-28

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