JPS62184667U - - Google Patents
Info
- Publication number
- JPS62184667U JPS62184667U JP7341786U JP7341786U JPS62184667U JP S62184667 U JPS62184667 U JP S62184667U JP 7341786 U JP7341786 U JP 7341786U JP 7341786 U JP7341786 U JP 7341786U JP S62184667 U JPS62184667 U JP S62184667U
- Authority
- JP
- Japan
- Prior art keywords
- light
- holder
- substrate
- light emitter
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 5
- 238000001514 detection method Methods 0.000 claims description 3
- 230000003287 optical effect Effects 0.000 claims description 2
- 238000005468 ion implantation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986073417U JPH0723899Y2 (ja) | 1986-05-15 | 1986-05-15 | 基板検出装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986073417U JPH0723899Y2 (ja) | 1986-05-15 | 1986-05-15 | 基板検出装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62184667U true JPS62184667U (en:Method) | 1987-11-24 |
| JPH0723899Y2 JPH0723899Y2 (ja) | 1995-05-31 |
Family
ID=30917730
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986073417U Expired - Lifetime JPH0723899Y2 (ja) | 1986-05-15 | 1986-05-15 | 基板検出装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0723899Y2 (en:Method) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60193250A (ja) * | 1984-03-15 | 1985-10-01 | Toshiba Corp | イオン注入装置 |
-
1986
- 1986-05-15 JP JP1986073417U patent/JPH0723899Y2/ja not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60193250A (ja) * | 1984-03-15 | 1985-10-01 | Toshiba Corp | イオン注入装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0723899Y2 (ja) | 1995-05-31 |