JPS62182642A - High sensitivity dew condensation sensor - Google Patents
High sensitivity dew condensation sensorInfo
- Publication number
- JPS62182642A JPS62182642A JP61024564A JP2456486A JPS62182642A JP S62182642 A JPS62182642 A JP S62182642A JP 61024564 A JP61024564 A JP 61024564A JP 2456486 A JP2456486 A JP 2456486A JP S62182642 A JPS62182642 A JP S62182642A
- Authority
- JP
- Japan
- Prior art keywords
- dew condensation
- protective film
- insulating protective
- electrode
- sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009833 condensation Methods 0.000 title claims abstract description 47
- 230000005494 condensation Effects 0.000 title claims abstract description 47
- 230000035945 sensitivity Effects 0.000 title abstract description 11
- 239000000758 substrate Substances 0.000 claims abstract description 26
- 230000001681 protective effect Effects 0.000 claims abstract description 24
- 239000005357 flat glass Substances 0.000 claims description 6
- 238000001514 detection method Methods 0.000 abstract description 18
- 239000000463 material Substances 0.000 abstract description 6
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 4
- 244000126211 Hericium coralloides Species 0.000 abstract description 3
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 2
- 239000000377 silicon dioxide Substances 0.000 abstract description 2
- SLXKOJJOQWFEFD-UHFFFAOYSA-N 6-aminohexanoic acid Chemical compound NCCCCCC(O)=O SLXKOJJOQWFEFD-UHFFFAOYSA-N 0.000 abstract 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052593 corundum Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 239000000126 substance Substances 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 229910001845 yogo sapphire Inorganic materials 0.000 abstract 1
- 239000011521 glass Substances 0.000 description 10
- 238000000034 method Methods 0.000 description 6
- XOLBLPGZBRYERU-UHFFFAOYSA-N tin dioxide Chemical compound O=[Sn]=O XOLBLPGZBRYERU-UHFFFAOYSA-N 0.000 description 6
- 239000003990 capacitor Substances 0.000 description 5
- 238000004544 sputter deposition Methods 0.000 description 5
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229920000728 polyester Polymers 0.000 description 2
- 229910001887 tin oxide Inorganic materials 0.000 description 2
- 238000001771 vacuum deposition Methods 0.000 description 2
- CMSGUKVDXXTJDQ-UHFFFAOYSA-N 4-(2-naphthalen-1-ylethylamino)-4-oxobutanoic acid Chemical compound C1=CC=C2C(CCNC(=O)CCC(=O)O)=CC=CC2=C1 CMSGUKVDXXTJDQ-UHFFFAOYSA-N 0.000 description 1
- VVQNEPGJFQJSBK-UHFFFAOYSA-N Methyl methacrylate Chemical compound COC(=O)C(C)=C VVQNEPGJFQJSBK-UHFFFAOYSA-N 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000007654 immersion Methods 0.000 description 1
- 229910003437 indium oxide Inorganic materials 0.000 description 1
- PJXISJQVUVHSOJ-UHFFFAOYSA-N indium(iii) oxide Chemical compound [O-2].[O-2].[O-2].[In+3].[In+3] PJXISJQVUVHSOJ-UHFFFAOYSA-N 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
- Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
本発明は自動車のバックウィンドガラスに貼着されて使
用されるオートデフォツガ用静電容量検出型高感度結露
センサに関する。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a capacitance detection type high-sensitivity dew condensation sensor for an auto defogger that is used by being attached to the back window glass of an automobile.
近年、自動車のバックウィンドガラス等において、曇り
が生じた時に、自動的に曇り（水分）を検知し、デフォ
ツガや導電性被膜（ヒータ膜）に通電して曇りを除去す
るオートデフォツガが開発されている（例えば、実開昭
５３−５８９５６号）。In recent years, an auto-defogger has been developed that automatically detects fogging (moisture) when it becomes foggy on a car's back window glass and removes the fog by applying electricity to the defogger and conductive film (heater film). (For example, Utility Model Application Publication No. 53-58956).
このオートデフォツガには、曇りを検出する結露センサ
（水分検出センサ）が用いられる。この結露センサには
抵抗検出型、静電容量検出型等があり、一般的には抵抗
検出型結露センサを用いたものが公知である（例えば、
実公昭５５−４８４２８号）。この抵抗検出型結露セン
サは、ガラス板表面上に対向して電極を設けたもの、あ
るいは更にこの電極間に跨がるように形成された親水性
被膜等の水分検出被膜を設けたものが知られており、上
記電極間あるいは水分検出被膜に水分が付着したとき、
センサ表面の電流の流れあるいは電流の流れによるイン
ピーダンスの変化を検出し、所定の設定値に達した時に
抵抗加熱素子を通電加熱するよう構成されている。また
、静電容量検出型結露センサは、ガラス基板上に形成さ
れたくし歯形電極とこの電極を保護する絶縁保護膜とか
らなり、対向電極に跨がって水分が付着したときの静電
容量の変化を検出して、この値が所定値を超えた時に抵
抗加熱素子に通電するものである。This auto defogger uses a dew condensation sensor (moisture detection sensor) that detects cloudy weather. There are two types of dew condensation sensors: resistance detection type, capacitance detection type, etc., and those using resistance detection type dew condensation sensors are generally known (for example,
(Jitko No. 55-48428). This resistance detection type dew condensation sensor is known to have electrodes placed opposite each other on the surface of a glass plate, or a moisture detection film such as a hydrophilic film formed to span between the electrodes. When moisture adheres between the electrodes or on the moisture detection coating,
The sensor is configured to detect the flow of current on the sensor surface or a change in impedance due to the flow of current, and when a predetermined set value is reached, the resistance heating element is heated by energization. The capacitance detection type dew condensation sensor consists of a comb-shaped electrode formed on a glass substrate and an insulating protective film that protects this electrode. It detects a change and energizes the resistance heating element when this value exceeds a predetermined value.
ところで、上記静電容量検出型結露センサは、透明基板
上に形成したくし歯形透明電極全体を覆うように絶縁保
護膜が形成されている。しかるに、結露粒子は初期にお
いてその粒子が約５μｍ程度と極めて小さく、くし歯形
透明電極のパターンを細かくしても十分な検出能力が得
られにくいという問題がある。結露センサのサイズを大
きくすれば、検出能力の増加を望めるものの、自動車の
バックウィンドガラス等に取り付けるという使用条件を
考慮すると、自ずと結露センサのサイズには限界がある
。Incidentally, in the capacitance detection type dew condensation sensor, an insulating protective film is formed to cover the entire comb-shaped transparent electrode formed on a transparent substrate. However, there is a problem in that the dew condensation particles are extremely small at an initial stage of about 5 μm, and it is difficult to obtain sufficient detection ability even if the pattern of the comb-shaped transparent electrode is made finer. Although it is possible to increase the detection ability by increasing the size of the dew condensation sensor, there is a limit to the size of the dew condensation sensor when considering the usage condition of attaching it to the back window glass of an automobile.
そこで、結露センサのサイズを大きくすることなく、結
露（水分）の検出感度を上げる工夫が求められていた。Therefore, there was a need for a way to increase the detection sensitivity of dew condensation (moisture) without increasing the size of the dew condensation sensor.
〔問題点を解決するための手段〕
上記問題は、次に述べる本発明の高感度結露センサによ
って解決される。[Means for Solving the Problems] The above problems are solved by the highly sensitive dew condensation sensor of the present invention, which will be described below.
即ち、本発明のオートデフォツガ用高域度結露センサは
、透明基板と、この透明基板上に形成されるくし歯形透
明電極と、このくし歯形透明電極の電極部のみを電極部
形状に倣って部分的に覆う絶縁保護膜とからなることを
特徴としている。That is, the high-frequency dew condensation sensor for an auto defogger of the present invention includes a transparent substrate, a comb-shaped transparent electrode formed on the transparent substrate, and only the electrode portion of the comb-shaped transparent electrode shaped like the electrode portion. It is characterized by consisting of a partially covered insulating protective film.
以下、本発明について更に詳細に説明する。The present invention will be explained in more detail below.
本発明において、結露センサは直接自動車のバックウィ
ンドガラス等の透明基板に形成してもよく、また例えば
縦横３０ｗ程度の小さな透明基板上に形成してこの透明
基板をバックウィンドガラスに貼着してもよい。小さな
透明基板を用いる場合には、この透明基板の厚さは０．
３鶴以下とすることが望ましい。これは、可撓性を持た
せるためと、見栄えを良くするためである。また、透明
基板の材料としては、ガラスもしくはポリエステル、メ
チルメタアクリレート等の樹脂（プラスチック）を用い
ることができる。In the present invention, the dew condensation sensor may be formed directly on a transparent substrate such as the back window glass of an automobile, or it may be formed on a small transparent substrate of about 30 W in length and width, and this transparent substrate is attached to the back window glass. Good too. When using a small transparent substrate, the thickness of this transparent substrate is 0.
It is desirable to have 3 cranes or less. This is to provide flexibility and improve appearance. Further, as a material for the transparent substrate, glass or resin (plastic) such as polyester or methyl methacrylate can be used.
この透明基板上には、くし歯形透明電極が形成される。A comb-shaped transparent electrode is formed on this transparent substrate.
このくし歯形透明電極としては、例えば酸化インジウム
（ＩｎｚＯｓ）と酸化錫（ＳｎＯ２）とを主成分とする
ＩＴＯ膜または酸化錫（ＳｎＯ２）からなるＮＥＳＡ膜
等を用いることができる。このくし歯形透明電極の電極
幅は０． Ｏ０５ｔｍ〜０．１ ＋ｎ、ギャップ幅は０
．００５ｍ 〜０．１ｍ程度とすることができる。この
くし歯形透明電極は通常真空蒸着法、スパッタリング法
、イオンブレーティング法等により形成され、厚さは数
百〜数千人とされる。As this comb-shaped transparent electrode, for example, an ITO film mainly composed of indium oxide (InzOs) and tin oxide (SnO2) or a NESA film made of tin oxide (SnO2) can be used. The electrode width of this comb-shaped transparent electrode is 0. O05tm~0.1 +n, gap width is 0
．． The length can be approximately 0.005 m to 0.1 m. This comb-shaped transparent electrode is usually formed by a vacuum evaporation method, a sputtering method, an ion blating method, etc., and has a thickness of several hundred to several thousand.
くし歯形透明電極の上には、電極部のみを電極形状に倣
って覆う絶縁保護膜が形成される。この絶縁保護膜材料
としては、酸化アルミニウム（ＡｌｚＯｚ＞、二酸化珪
素（ＳｉＯｇ）等を用いることができる。また、絶縁保
護膜の膜厚は０．２μｍ〜０．３μｍ程度とすることが
できる。この絶縁保護膜も、くし歯形透明電極と同様に
真空蒸着法、スパッタリング法等の真空成膜法により形
成することができる。An insulating protective film is formed on the comb-shaped transparent electrode to cover only the electrode portion following the shape of the electrode. As this insulating protective film material, aluminum oxide (AlzOz>, silicon dioxide (SiOg), etc. can be used. Furthermore, the thickness of the insulating protective film can be about 0.2 μm to 0.3 μm. Similarly to the comb-shaped transparent electrode, the insulating protective film can also be formed by a vacuum film forming method such as a vacuum evaporation method or a sputtering method.
本発明の高感度結露センサは、一種のコンデンサであり
、コンデンサに置き換えて考えることができる。一般に
、平行平板コンデンサの静電容量ＣはＣ＝ε０ ・ε・
Ｓ／ｄ （ここで、ε０ は真空中の誘電率、εは比誘
電率（以下誘電率と略す）、Ｓは電極の面積、ｄは電極
間の距離）で表される。The high-sensitivity dew condensation sensor of the present invention is a type of capacitor, and can be considered in place of a capacitor. Generally, the capacitance C of a parallel plate capacitor is C=ε0 ・ε・
It is expressed as S/d (here, ε0 is the dielectric constant in vacuum, ε is the relative dielectric constant (hereinafter abbreviated as dielectric constant), S is the area of the electrode, and d is the distance between the electrodes).
このとき、εは電極を取り巻く物質によって異なる。即
ち、誘電率は空気が１、ガラスが約５、酸化アルミニウ
ム等の絶縁保護膜が約１０、水が約８０である。従って
、結露センサ（コンデンサ）の初期容量は電極の面積お
よび電極間距離を一定とすると、電極を取り巻く物質の
平均誘電率が低い程、変化率が大きくなって感度が上が
ることになる。At this time, ε differs depending on the material surrounding the electrode. That is, the dielectric constant is 1 for air, about 5 for glass, about 10 for an insulating protective film such as aluminum oxide, and about 80 for water. Therefore, assuming that the area of the electrodes and the distance between the electrodes are constant, the lower the average permittivity of the material surrounding the electrodes, the larger the rate of change in the initial capacitance of the dew condensation sensor (capacitor) and the higher the sensitivity.
しかるに、本発明の結露センサによれば、従来くし歯形
透明電極のみでなく、くし歯形透明電極が形成されてい
る透明基板表面をも絶縁保護膜で覆っていたのが、くし
歯形透明電極表面のみを部分的に覆うようにしたため、
従来の結露センサと比較すると絶縁保護膜の一部が空気
に置き代わったことになる。この空気の誘電率は絶縁保
護膜の約１／１０であるため、εが全体的に小さくなり
、コンデンサ、即ち、結露センサの感度が向上する。However, according to the dew condensation sensor of the present invention, only the surface of the comb-shaped transparent electrode is covered with an insulating protective film, whereas in the past, not only the comb-shaped transparent electrode but also the surface of the transparent substrate on which the comb-shaped transparent electrode was formed was covered with an insulating protective film. Because it partially covers the
Compared to conventional dew condensation sensors, part of the insulating protective film is replaced by air. Since the dielectric constant of this air is about 1/10 that of the insulating protective film, ε is reduced overall, and the sensitivity of the capacitor, that is, the dew condensation sensor is improved.
次に、本発明の実施例を図面を参考にして説明する。 Next, embodiments of the present invention will be described with reference to the drawings.
ここで、第１図は本発明の実施例に係る亮感度結露セン
サの製造方法の各工程を示す概略工程図、第２図は本発
明の実施例に係る高感度結露センサの概略断面図、第３
図は本発明の実施例に係る高感度結露センサの概略平匍
図である。Here, FIG. 1 is a schematic process diagram showing each step of a method for manufacturing a highly sensitive dew condensation sensor according to an embodiment of the present invention, and FIG. 2 is a schematic sectional view of a highly sensitive dew condensation sensor according to an embodiment of the present invention. Third
The figure is a schematic plan view of a high-sensitivity dew condensation sensor according to an embodiment of the present invention.
まず、第１図（ａ）に示すように、透明電極を形成する
透明基板として縦４０鶴、横２５鶴、厚さ０゜３ｍｌの
ガラス基板１を準備する。このガラス基板１上にスパッ
タリング法によりＩＴＯからなる透明電極２を約０．１
μｍの厚さに形成する。続いて、この透明電極２の上に
レジスト膜３を形成し、第１図（ｂ）の状態とする。次
いで、このレジスト膜３の上に、くし歯形透明電極形成
用のネガフィルム４を置き、第１図（Ｃ１に示すように
、紫外線を照射する。これを、現像し、水洗すると、第
１図（ｄ）に示す状態となる。続いて、エソチンダ液に
浸漬し、レジスト膜３で保護されていない透明電極部を
除去し、第１図（６１の状態とする。この状態で、ガラ
ス基板１を真空槽に入れ、斜めスパッタリングにより、
第１図ｔｆｌに示すように、酸化アルミニウムからなる
絶縁保護膜５を透明電極２の端面およびレジスト膜３側
面に形成する。次に、レジスト膜３を゛除去することに
より第１図（ｇ）に示す状態とする。その後、電極部以
外の部分をマスキングし、スパッタリングにより電極表
面に酸化アルミニウムからなる絶縁保護膜５を０．３μ
ｍの厚さに形成する。そして、マスキング材を除去する
ことにより、第１図（ｈｌに示す結露センサ６が得られ
る。この結露センサ６の概略を全体的に見た図が第２図
と第３図であり、第２図は断面図、第３図は平面図（但
し、一部省略）である。なお、くし歯形透明電極２の電
極幅Ｔとギャップ幅ｔは共に５μｍとし、くし歯部６ａ
の長さρは２０ｍ■、くし歯部の数は２０００本とした
。First, as shown in FIG. 1(a), a glass substrate 1 having a length of 40 squares, a width of 25 squares, and a thickness of 0.degree. 3 ml is prepared as a transparent substrate on which a transparent electrode will be formed. A transparent electrode 2 made of ITO is deposited on this glass substrate 1 by a sputtering method with a thickness of about 0.1
Formed to a thickness of μm. Subsequently, a resist film 3 is formed on the transparent electrode 2 to obtain the state shown in FIG. 1(b). Next, a negative film 4 for forming a comb-shaped transparent electrode is placed on the resist film 3 and irradiated with ultraviolet rays as shown in FIG. 1 (C1). The state shown in FIG. 1(d) is obtained.Subsequently, the transparent electrode portions not protected by the resist film 3 are removed by immersion in Esotynda solution, resulting in the state shown in FIG. 1 (61).In this state, the glass substrate 1 is placed in a vacuum chamber, and by diagonal sputtering,
As shown in FIG. 1 tfl, an insulating protective film 5 made of aluminum oxide is formed on the end face of the transparent electrode 2 and the side surface of the resist film 3 . Next, the resist film 3 is removed to obtain the state shown in FIG. 1(g). After that, parts other than the electrode part are masked, and an insulating protective film 5 made of aluminum oxide is applied to the electrode surface by 0.3 μm by sputtering.
Form to a thickness of m. Then, by removing the masking material, the dew condensation sensor 6 shown in FIG. 1 (hl) is obtained. FIGS. The figure is a sectional view, and FIG. 3 is a plan view (however, some parts are omitted).The electrode width T and gap width t of the comb-shaped transparent electrode 2 are both 5 μm, and the comb-teeth portion 6a
The length ρ was 20 m, and the number of comb teeth was 2000.
この結果得られた結露センサを用いて、結露の検出感度
を調べた。即ち、この結露センサの初期容量Ｃｏを測定
したところ４９５ｐＦであり、結露後の静電容ｔＣ１は
１２２０ｐＦであった。この結果、変化率Ｐは（（Ｃ＋
−Ｃｏ） ／Ｃ０〕Ｘ１００＝１４６％であった。Using the dew condensation sensor obtained as a result, the detection sensitivity of dew condensation was investigated. That is, when the initial capacitance Co of this dew condensation sensor was measured, it was 495 pF, and the capacitance tC1 after dew condensation was 1220 pF. As a result, the rate of change P is ((C+
-Co)/C0]X100=146%.
（比較例）
実施例と同様なガラス基板１上に、実施例の第１図（ａ
）〜＋ｅ）と同じ工程を経て第１図（８１の状態とした
のち、レジスト膜３を除去し、くし歯形透明電極２およ
びガラス基板ｌの上に酸化アルミニウムからなるｗＡ縁
保護膜５を約１．０μｍの厚さに形成した。なお、絶縁
保護膜５の膜厚が実施例より大きいのは、くし歯形透明
電極端部における絶縁性を完全なものにするためである
。(Comparative Example) On a glass substrate 1 similar to that of the example, a sample shown in FIG.
) to +e) to obtain the state shown in FIG. The thickness of the insulating protective film 5 was 1.0 μm.The reason why the insulating protective film 5 was thicker than in the example was to perfect the insulation at the end of the comb-shaped transparent electrode.
この結果得られた結露センサを用いて、実施例と同様に
結露の検出感度を調べた。即ち、この結露センサの初朋
容ｆｆ１ＣＯを測定したところ６４５ｐＦであり、結露
後の静電容量Ｃ，は１３００ｐＦであった。この結果、
変化率Ｐは（（ｃＩ−Ｃ０）／Ｃｏ）Ｘ１００＝１０２
％であった。Using the resulting dew condensation sensor, the dew condensation detection sensitivity was investigated in the same manner as in the example. That is, when the initial capacity ff1CO of this dew condensation sensor was measured, it was 645 pF, and the capacitance C after dew condensation was 1300 pF. As a result,
The rate of change P is ((cI-C0)/Co)X100=102
%Met.
上記実施例と比較例の結果より、本発明の実施例に係る
結露センサは、比較例（従来）の結露センサより結露の
検出感度が４０％以上も向上していることが判る。From the results of the above examples and comparative examples, it can be seen that the dew condensation sensor according to the example of the present invention has a dew condensation detection sensitivity that is 40% or more higher than that of the comparative example (conventional) dew condensation sensor.
以上、本発明の特定の実施例について説明したが、本発
明は上記実施例に限定されるものではなく、特許請求の
範囲内において種々の実施態様を包含するものである。Although specific embodiments of the present invention have been described above, the present invention is not limited to the above embodiments, but includes various embodiments within the scope of the claims.
例えば、実施例では透明基板としてガラス基板を用いる
例を示したが、ポリエステル基板等のプラスチック基板
を用いてもよい。For example, although the example uses a glass substrate as the transparent substrate, a plastic substrate such as a polyester substrate may also be used.
以上より、本発明の高感度結露センサによれば、結露セ
ンサのサイズを大きくすることなく、結露の検出感度を
大幅に向上させることができるという優れた効果を奏す
る。As described above, the high-sensitivity dew condensation sensor of the present invention has the excellent effect of significantly improving the dew condensation detection sensitivity without increasing the size of the dew condensation sensor.
第１図は本発明の実施例に係る高感度結露センサの製造
方法の各工程を示す概略工程図、第２図は本発明の実施
例に係る高感度結露セ７サの概略断面図、
第３図は本発明の実施例に係る高感度結露センサの概略
平面図である。
１−・・・ガラス基板（透明基板）
２−−−−−−− ＜ Ｌ歯形透明電極（透明電極）３
−・・・−・レジスト膜
４−・・−・−ネガフィルム
５−−−一・絶縁保護膜
６−−−−−−−結露センサ
６ａ−・・・−・くし歯部1 is a schematic process diagram showing each step of a method for manufacturing a high-sensitivity dew condensation sensor according to an embodiment of the present invention; FIG. 2 is a schematic sectional view of a high-sensitivity condensation sensor 7 according to an embodiment of the present invention; FIG. 3 is a schematic plan view of a high-sensitivity dew condensation sensor according to an embodiment of the present invention. 1-...Glass substrate (transparent substrate) 2--------<L-tooth-shaped transparent electrode (transparent electrode) 3
--- Resist film 4 --- Negative film 5 --- Insulating protective film 6 --- Condensation sensor 6a --- Comb tooth portion
Claims (1)
れて使用されるオートデフォッガ用高感度結露センサで
あって、 透明基板と、この透明基板上に形成されるくし歯形透明
電極と、このくし歯形透明電極の電極部のみを電極部形
状に倣って部分的に覆う絶縁保護膜とからなることを特
徴とするオートデフォッガ用高感度結露センサ。[Claims] 1) A high-sensitivity dew condensation sensor for an auto defogger used by being attached to the inside of a back window glass of an automobile, comprising: a transparent substrate; a comb-shaped transparent electrode formed on the transparent substrate; A high-sensitivity dew condensation sensor for an auto defogger, comprising an insulating protective film that partially covers only the electrode portion of the comb-shaped transparent electrode, following the shape of the electrode portion.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61024564A JPS62182642A (en) | 1986-02-06 | 1986-02-06 | High sensitivity dew condensation sensor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP61024564A JPS62182642A (en) | 1986-02-06 | 1986-02-06 | High sensitivity dew condensation sensor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62182642A true JPS62182642A (en) | 1987-08-11 |
Family
ID=12141649
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP61024564A Pending JPS62182642A (en) | 1986-02-06 | 1986-02-06 | High sensitivity dew condensation sensor |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62182642A (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103529093A (en) * | 2013-11-01 | 2014-01-22 | 中国气象局气象探测中心 | Capacitance type moisture condensation sensor |
| EP3712603A1 (en) * | 2019-03-22 | 2020-09-23 | Hitachi, Ltd. | Moisture detection element, exhaled gas detector, exhalation test system, and manufacturing method of exhalation detection element |
| CN112729641A (en) * | 2020-12-01 | 2021-04-30 | 上海空间推进研究所 | System and method for measuring response time of cold air thruster based on variable dielectric capacitance bridge |
| WO2021241628A1 (en) * | 2020-05-29 | 2021-12-02 | 日本碍子株式会社 | Capacitive sensor |
-
1986
- 1986-02-06 JP JP61024564A patent/JPS62182642A/en active Pending
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103529093A (en) * | 2013-11-01 | 2014-01-22 | 中国气象局气象探测中心 | Capacitance type moisture condensation sensor |
| EP3712603A1 (en) * | 2019-03-22 | 2020-09-23 | Hitachi, Ltd. | Moisture detection element, exhaled gas detector, exhalation test system, and manufacturing method of exhalation detection element |
| JP2020153912A (en) * | 2019-03-22 | 2020-09-24 | 株式会社日立製作所 | Moisture detection element, exhaled gas detector, exhalation detection system, and exhalation detection element manufacturing method |
| US11371950B2 (en) | 2019-03-22 | 2022-06-28 | Hitachi, Ltd. | Moisture detection element, exhaled gas detector, exhalation test system, and manufacturing method of exhalation detection element |
| WO2021241628A1 (en) * | 2020-05-29 | 2021-12-02 | 日本碍子株式会社 | Capacitive sensor |
| JPWO2021241628A1 (en) * | 2020-05-29 | 2021-12-02 | ||
| CN112729641A (en) * | 2020-12-01 | 2021-04-30 | 上海空间推进研究所 | System and method for measuring response time of cold air thruster based on variable dielectric capacitance bridge |
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