JPS62182547U - - Google Patents
Info
- Publication number
- JPS62182547U JPS62182547U JP7060986U JP7060986U JPS62182547U JP S62182547 U JPS62182547 U JP S62182547U JP 7060986 U JP7060986 U JP 7060986U JP 7060986 U JP7060986 U JP 7060986U JP S62182547 U JPS62182547 U JP S62182547U
- Authority
- JP
- Japan
- Prior art keywords
- duct
- waste liquid
- drain outlet
- ventilation duct
- storage tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 4
- 238000000605 extraction Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000009423 ventilation Methods 0.000 claims 3
- 239000002699 waste material Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7060986U JPH0416431Y2 (ru) | 1986-05-13 | 1986-05-13 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7060986U JPH0416431Y2 (ru) | 1986-05-13 | 1986-05-13 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS62182547U true JPS62182547U (ru) | 1987-11-19 |
JPH0416431Y2 JPH0416431Y2 (ru) | 1992-04-13 |
Family
ID=30912401
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7060986U Expired JPH0416431Y2 (ru) | 1986-05-13 | 1986-05-13 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0416431Y2 (ru) |
-
1986
- 1986-05-13 JP JP7060986U patent/JPH0416431Y2/ja not_active Expired
Also Published As
Publication number | Publication date |
---|---|
JPH0416431Y2 (ru) | 1992-04-13 |