JPS62182547U - - Google Patents
Info
- Publication number
- JPS62182547U JPS62182547U JP7060986U JP7060986U JPS62182547U JP S62182547 U JPS62182547 U JP S62182547U JP 7060986 U JP7060986 U JP 7060986U JP 7060986 U JP7060986 U JP 7060986U JP S62182547 U JPS62182547 U JP S62182547U
- Authority
- JP
- Japan
- Prior art keywords
- duct
- waste liquid
- drain outlet
- ventilation duct
- storage tank
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 claims description 6
- 238000001816 cooling Methods 0.000 claims description 4
- 238000000605 extraction Methods 0.000 claims description 3
- 239000004065 semiconductor Substances 0.000 claims description 2
- 238000009423 ventilation Methods 0.000 claims 3
- 239000002699 waste material Substances 0.000 claims 3
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Encapsulation Of And Coatings For Semiconductor Or Solid State Devices (AREA)
Description
第１図はオープナー装置の全体の概要説明図、
第２図は排液取出装置の切断面図である。
主要な図面符号の説明、５……半導体開口部、
９……排液貯留タンク部、７１……冷却トラツプ
、７５……送風ダクト、７７……排液取出管、７
９……取入口、８１……吸引ポンプ。
Figure 1 is an overall schematic explanatory diagram of the opener device;
FIG. 2 is a sectional view of the drain liquid extraction device. Explanation of main drawing symbols, 5...Semiconductor opening,
9...Drainage storage tank section, 71...Cooling trap, 75...Blower duct, 77...Drainage extraction pipe, 7
9...Intake port, 81...Suction pump.
Claims (1)
終えた排液を該ダクト内を通る冷却風によつて冷
却する冷却トラツプと、冷却トラツプ内の排液を
一時溜めておく排液貯留タンク部とを備えたオー
プナー装置において、前記送風ダクト内に、該ダ
クトの底部近接部位に取入口が臨む排液取出管を
設け、該排液取出管に吸引ポンプを接続すると共
に該ポンプの吐出口を排液貯留タンク部にそれぞ
れ接続連通させたことを特徴とするオープナー装
置の送風ダクト内の排液取出装置。 A cooling trap provided in the ventilation duct that cools the waste liquid that has finished its work at the semiconductor opening by cooling air passing through the duct, and a waste liquid storage tank part that temporarily stores the waste liquid in the cooling trap. In the opener device, a drain outlet pipe is provided in the ventilation duct with an intake port facing a portion near the bottom of the duct, a suction pump is connected to the drain outlet tube, and a discharge port of the pump is connected to the drain outlet. A drain liquid extraction device in a ventilation duct of an opener device, characterized in that the device is connected and communicated with a liquid storage tank.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7060986U JPH0416431Y2 (en) | 1986-05-13 | 1986-05-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7060986U JPH0416431Y2 (en) | 1986-05-13 | 1986-05-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62182547U true JPS62182547U (en) | 1987-11-19 |
| JPH0416431Y2 JPH0416431Y2 (en) | 1992-04-13 |
Family
ID=30912401
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7060986U Expired JPH0416431Y2 (en) | 1986-05-13 | 1986-05-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0416431Y2 (en) |
-
1986
- 1986-05-13 JP JP7060986U patent/JPH0416431Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0416431Y2 (en) | 1992-04-13 |