JPS62182535U - - Google Patents

Info

Publication number
JPS62182535U
JPS62182535U JP6874586U JP6874586U JPS62182535U JP S62182535 U JPS62182535 U JP S62182535U JP 6874586 U JP6874586 U JP 6874586U JP 6874586 U JP6874586 U JP 6874586U JP S62182535 U JPS62182535 U JP S62182535U
Authority
JP
Japan
Prior art keywords
processed
thin film
ion source
rotating
source
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6874586U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6874586U priority Critical patent/JPS62182535U/ja
Publication of JPS62182535U publication Critical patent/JPS62182535U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
JP6874586U 1986-05-09 1986-05-09 Pending JPS62182535U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6874586U JPS62182535U (enrdf_load_stackoverflow) 1986-05-09 1986-05-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6874586U JPS62182535U (enrdf_load_stackoverflow) 1986-05-09 1986-05-09

Publications (1)

Publication Number Publication Date
JPS62182535U true JPS62182535U (enrdf_load_stackoverflow) 1987-11-19

Family

ID=30908844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6874586U Pending JPS62182535U (enrdf_load_stackoverflow) 1986-05-09 1986-05-09

Country Status (1)

Country Link
JP (1) JPS62182535U (enrdf_load_stackoverflow)

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