JPS6218221U - - Google Patents

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Publication number
JPS6218221U
JPS6218221U JP10976385U JP10976385U JPS6218221U JP S6218221 U JPS6218221 U JP S6218221U JP 10976385 U JP10976385 U JP 10976385U JP 10976385 U JP10976385 U JP 10976385U JP S6218221 U JPS6218221 U JP S6218221U
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JP
Japan
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support plate
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10976385U
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English (en)
Japanese (ja)
Other versions
JPH0411871Y2 (enrdf_load_stackoverflow
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Publication date
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Priority to JP1985109763U priority Critical patent/JPH0411871Y2/ja
Publication of JPS6218221U publication Critical patent/JPS6218221U/ja
Application granted granted Critical
Publication of JPH0411871Y2 publication Critical patent/JPH0411871Y2/ja
Expired legal-status Critical Current

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JP1985109763U 1985-07-19 1985-07-19 Expired JPH0411871Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1985109763U JPH0411871Y2 (enrdf_load_stackoverflow) 1985-07-19 1985-07-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1985109763U JPH0411871Y2 (enrdf_load_stackoverflow) 1985-07-19 1985-07-19

Publications (2)

Publication Number Publication Date
JPS6218221U true JPS6218221U (enrdf_load_stackoverflow) 1987-02-03
JPH0411871Y2 JPH0411871Y2 (enrdf_load_stackoverflow) 1992-03-24

Family

ID=30988157

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1985109763U Expired JPH0411871Y2 (enrdf_load_stackoverflow) 1985-07-19 1985-07-19

Country Status (1)

Country Link
JP (1) JPH0411871Y2 (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP2423349A1 (en) * 2009-04-24 2012-02-29 Tokyo Electron Limited Vapor deposition apparatus and vapor deposition method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4940099U (enrdf_load_stackoverflow) * 1972-07-11 1974-04-09
JPS57171935U (enrdf_load_stackoverflow) * 1981-04-24 1982-10-29
JPS6127309U (ja) * 1984-07-23 1986-02-18 北陸電気工業株式会社 電子部品

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4940099U (enrdf_load_stackoverflow) * 1972-07-11 1974-04-09
JPS57171935U (enrdf_load_stackoverflow) * 1981-04-24 1982-10-29
JPS6127309U (ja) * 1984-07-23 1986-02-18 北陸電気工業株式会社 電子部品

Also Published As

Publication number Publication date
JPH0411871Y2 (enrdf_load_stackoverflow) 1992-03-24

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