JPS62181770U - - Google Patents

Info

Publication number
JPS62181770U
JPS62181770U JP6826886U JP6826886U JPS62181770U JP S62181770 U JPS62181770 U JP S62181770U JP 6826886 U JP6826886 U JP 6826886U JP 6826886 U JP6826886 U JP 6826886U JP S62181770 U JPS62181770 U JP S62181770U
Authority
JP
Japan
Prior art keywords
electrostrictive element
insulating structure
valve
fluid passage
polymer film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6826886U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0314617Y2 (de
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986068268U priority Critical patent/JPH0314617Y2/ja
Publication of JPS62181770U publication Critical patent/JPS62181770U/ja
Application granted granted Critical
Publication of JPH0314617Y2 publication Critical patent/JPH0314617Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Electrically Driven Valve-Operating Means (AREA)
JP1986068268U 1986-05-08 1986-05-08 Expired JPH0314617Y2 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986068268U JPH0314617Y2 (de) 1986-05-08 1986-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986068268U JPH0314617Y2 (de) 1986-05-08 1986-05-08

Publications (2)

Publication Number Publication Date
JPS62181770U true JPS62181770U (de) 1987-11-18
JPH0314617Y2 JPH0314617Y2 (de) 1991-04-02

Family

ID=30907928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986068268U Expired JPH0314617Y2 (de) 1986-05-08 1986-05-08

Country Status (1)

Country Link
JP (1) JPH0314617Y2 (de)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008232202A (ja) * 2007-03-19 2008-10-02 Shinko Electric Co Ltd 圧電式バルブ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6122973U (ja) * 1984-07-13 1986-02-10 株式会社 小金井製作所 電子弁

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6122973U (ja) * 1984-07-13 1986-02-10 株式会社 小金井製作所 電子弁

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2008232202A (ja) * 2007-03-19 2008-10-02 Shinko Electric Co Ltd 圧電式バルブ

Also Published As

Publication number Publication date
JPH0314617Y2 (de) 1991-04-02

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