JPH0269079U - - Google Patents

Info

Publication number
JPH0269079U
JPH0269079U JP14732688U JP14732688U JPH0269079U JP H0269079 U JPH0269079 U JP H0269079U JP 14732688 U JP14732688 U JP 14732688U JP 14732688 U JP14732688 U JP 14732688U JP H0269079 U JPH0269079 U JP H0269079U
Authority
JP
Japan
Prior art keywords
pump
unit
piezoelectric vibrator
actuator unit
check valve
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14732688U
Other languages
English (en)
Japanese (ja)
Other versions
JP2542620Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988147326U priority Critical patent/JP2542620Y2/ja
Publication of JPH0269079U publication Critical patent/JPH0269079U/ja
Application granted granted Critical
Publication of JP2542620Y2 publication Critical patent/JP2542620Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Reciprocating Pumps (AREA)
JP1988147326U 1988-11-11 1988-11-11 圧電ポンプ Expired - Lifetime JP2542620Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988147326U JP2542620Y2 (ja) 1988-11-11 1988-11-11 圧電ポンプ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988147326U JP2542620Y2 (ja) 1988-11-11 1988-11-11 圧電ポンプ

Publications (2)

Publication Number Publication Date
JPH0269079U true JPH0269079U (de) 1990-05-25
JP2542620Y2 JP2542620Y2 (ja) 1997-07-30

Family

ID=31417618

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988147326U Expired - Lifetime JP2542620Y2 (ja) 1988-11-11 1988-11-11 圧電ポンプ

Country Status (1)

Country Link
JP (1) JP2542620Y2 (de)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008013191A1 (fr) 2006-07-25 2008-01-31 Panasonic Electric Works Co., Ltd. Pompe à membrane
WO2015141259A1 (ja) * 2014-03-20 2015-09-24 住友ゴム工業株式会社 ダイアフラムの固定構造、それを備えたダイアフラムポンプ及び弁装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01285681A (ja) * 1988-05-11 1989-11-16 Olympus Optical Co Ltd バイモルフ式ポンプ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01285681A (ja) * 1988-05-11 1989-11-16 Olympus Optical Co Ltd バイモルフ式ポンプ

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2008013191A1 (fr) 2006-07-25 2008-01-31 Panasonic Electric Works Co., Ltd. Pompe à membrane
WO2015141259A1 (ja) * 2014-03-20 2015-09-24 住友ゴム工業株式会社 ダイアフラムの固定構造、それを備えたダイアフラムポンプ及び弁装置
CN106062365A (zh) * 2014-03-20 2016-10-26 住友橡胶工业株式会社 隔膜的固定构造、具备其的隔膜泵以及阀装置
US10233917B2 (en) 2014-03-20 2019-03-19 Sumitomo Rubber Industries, Ltd. Structure for securing diaphragm, and diaphragm pump and valve device equipped with the same

Also Published As

Publication number Publication date
JP2542620Y2 (ja) 1997-07-30

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