JPS62181546U - - Google Patents

Info

Publication number
JPS62181546U
JPS62181546U JP7026686U JP7026686U JPS62181546U JP S62181546 U JPS62181546 U JP S62181546U JP 7026686 U JP7026686 U JP 7026686U JP 7026686 U JP7026686 U JP 7026686U JP S62181546 U JPS62181546 U JP S62181546U
Authority
JP
Japan
Prior art keywords
plate
view
shaped body
wafers
cartridge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7026686U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0415682Y2 (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986070266U priority Critical patent/JPH0415682Y2/ja
Publication of JPS62181546U publication Critical patent/JPS62181546U/ja
Application granted granted Critical
Publication of JPH0415682Y2 publication Critical patent/JPH0415682Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Registering Or Overturning Sheets (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP1986070266U 1986-05-09 1986-05-09 Expired JPH0415682Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986070266U JPH0415682Y2 (OSRAM) 1986-05-09 1986-05-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986070266U JPH0415682Y2 (OSRAM) 1986-05-09 1986-05-09

Publications (2)

Publication Number Publication Date
JPS62181546U true JPS62181546U (OSRAM) 1987-11-18
JPH0415682Y2 JPH0415682Y2 (OSRAM) 1992-04-08

Family

ID=30911750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986070266U Expired JPH0415682Y2 (OSRAM) 1986-05-09 1986-05-09

Country Status (1)

Country Link
JP (1) JPH0415682Y2 (OSRAM)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6236229A (ja) * 1985-08-08 1987-02-17 Canon Inc ウエハ処理装置

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6236229A (ja) * 1985-08-08 1987-02-17 Canon Inc ウエハ処理装置

Also Published As

Publication number Publication date
JPH0415682Y2 (OSRAM) 1992-04-08

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