JPS62181540U - - Google Patents

Info

Publication number
JPS62181540U
JPS62181540U JP6937986U JP6937986U JPS62181540U JP S62181540 U JPS62181540 U JP S62181540U JP 6937986 U JP6937986 U JP 6937986U JP 6937986 U JP6937986 U JP 6937986U JP S62181540 U JPS62181540 U JP S62181540U
Authority
JP
Japan
Prior art keywords
transport roller
wafer
resistant
transfer device
drive shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6937986U
Other languages
English (en)
Japanese (ja)
Other versions
JPH053477Y2 (US20030199744A1-20031023-C00003.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986069379U priority Critical patent/JPH053477Y2/ja
Publication of JPS62181540U publication Critical patent/JPS62181540U/ja
Application granted granted Critical
Publication of JPH053477Y2 publication Critical patent/JPH053477Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Rollers For Roller Conveyors For Transfer (AREA)
  • Delivering By Means Of Belts And Rollers (AREA)
JP1986069379U 1986-05-08 1986-05-08 Expired - Lifetime JPH053477Y2 (US20030199744A1-20031023-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986069379U JPH053477Y2 (US20030199744A1-20031023-C00003.png) 1986-05-08 1986-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986069379U JPH053477Y2 (US20030199744A1-20031023-C00003.png) 1986-05-08 1986-05-08

Publications (2)

Publication Number Publication Date
JPS62181540U true JPS62181540U (US20030199744A1-20031023-C00003.png) 1987-11-18
JPH053477Y2 JPH053477Y2 (US20030199744A1-20031023-C00003.png) 1993-01-27

Family

ID=30910062

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986069379U Expired - Lifetime JPH053477Y2 (US20030199744A1-20031023-C00003.png) 1986-05-08 1986-05-08

Country Status (1)

Country Link
JP (1) JPH053477Y2 (US20030199744A1-20031023-C00003.png)

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS551015U (US20030199744A1-20031023-C00003.png) * 1978-06-15 1980-01-07
JPS5820314A (ja) * 1981-07-27 1983-02-05 Sumitomo Metal Ind Ltd 鋼板のスクラツチ疵防止方法
JPS60169148A (ja) * 1984-02-13 1985-09-02 Dainippon Screen Mfg Co Ltd 基板の搬送方法及びその装置
JPS60195829U (ja) * 1984-06-04 1985-12-27 大日本スクリ−ン製造株式会社 基板反転装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS551015B2 (US20030199744A1-20031023-C00003.png) * 1972-02-15 1980-01-11

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS551015U (US20030199744A1-20031023-C00003.png) * 1978-06-15 1980-01-07
JPS5820314A (ja) * 1981-07-27 1983-02-05 Sumitomo Metal Ind Ltd 鋼板のスクラツチ疵防止方法
JPS60169148A (ja) * 1984-02-13 1985-09-02 Dainippon Screen Mfg Co Ltd 基板の搬送方法及びその装置
JPS60195829U (ja) * 1984-06-04 1985-12-27 大日本スクリ−ン製造株式会社 基板反転装置

Also Published As

Publication number Publication date
JPH053477Y2 (US20030199744A1-20031023-C00003.png) 1993-01-27

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