JPS62180946U

JPS62180946U -

Info

Publication number: JPS62180946U
Application number: JP6818186U
Authority: JP
Priority date: 1986-05-08
Filing date: 1986-05-08
Publication date: 1987-11-17
Also published as: JPH0249720Y2

Description

[Brief explanation of the drawing]

第１図は本考案の１実施例装置を示す正面図、
第２図は本考案を実施した基板浸漬処理装置の概
要を示す斜視図、第３図は偏心カムの正面図、第
４図は第３図示カムによるカム回転量と移動量の
関係を示すグラフ、第５図は直線運動カムを用い
た１実施例の正面図、第６図は同じく側面図、第
７図は挾持アーム付勢手段の１実施例、第８図は
ウエハを直接挾持するアームの１実施例、第９図
は従来装置の１例を示す図である。１……ウエハ、２……カセツト、３，４……挾
持アーム、５……軸受、８……リンク、９……ク
ランク、１１……ウエハ、１２……カセツト、１
３……処理液槽、１４……レール、１５……サド
ル、１７……レール、１８……昇降台、２０……
回転軸、２１……挾持アーム、２２……爪、２３
……バネかけ、２４……スプリング、２５……レ
バー、２６……ローラ、２７……昇降板、２８…
…ガイド、２９……カム回転軸、３０……偏心カ
ム、３１……軸受、３２……ローラ、３３……ガ
イドレール、３４……カム、３６……クランク、
３７……バネかけ、３８……スプリング、３９…
…溝部。 FIG. 1 is a front view showing one embodiment of the device of the present invention;
Fig. 2 is a perspective view showing an overview of the substrate immersion processing apparatus implementing the present invention, Fig. 3 is a front view of the eccentric cam, and Fig. 4 is a graph showing the relationship between the amount of cam rotation and the amount of movement by the cam shown in the third figure. , FIG. 5 is a front view of an embodiment using a linear motion cam, FIG. 6 is a side view, FIG. 7 is an embodiment of a clamping arm biasing means, and FIG. 8 is an arm that directly clamps a wafer. FIG. 9 is a diagram showing an example of a conventional device. 1...Wafer, 2...Cassette, 3, 4...Holding arm, 5...Bearing, 8...Link, 9...Crank, 11...Wafer, 12...Cassette, 1
3... Processing liquid tank, 14... Rail, 15... Saddle, 17... Rail, 18... Lifting platform, 20...
Rotating shaft, 21... Clamping arm, 22... Claw, 23
... Spring hook, 24 ... Spring, 25 ... Lever, 26 ... Roller, 27 ... Lifting plate, 28 ...
... Guide, 29 ... Cam rotation shaft, 30 ... Eccentric cam, 31 ... Bearing, 32 ... Roller, 33 ... Guide rail, 34 ... Cam, 36 ... Crank,
37...spring hook, 38...spring, 39...
...Mizobe.

Claims

[Scope of Claim for Utility Model Registration] (1) In a transportation clamping device that clamps an object to be transported by a pair or plural pairs of clamping arms that open and close oppositely, the clamping arms are pivotally supported, and the clamping arms are rotated. a pair of left and right rotating shafts that open and close; a biasing means that urges the rotating shafts so that the clamping arm rotates outwardly; and a biasing means that projects inwardly from the rotating shafts, respectively. It consists of a pair of fixed left and right levers, an elevating plate that lifts and lowers by contacting the lower surface of the tips of the pair of levers, and a cam that is disposed below the elevating plate and raises and lowers the elevating plate by displacement, the cam. 2. A conveyance holding device, characterized in that the region is formed in such a shape that the region for raising the elevating plate to the highest position exists over a required range during the displacement stroke. (2) The cam is a rotary eccentric cam whose outline is formed by an arc centered on the rotation center within the required angle range, and a curve whose distance from the rotation center gradually decreases from both ends of the arc. A conveying holding device according to claim (1) of the utility model registration claim. (3) Utility model registration claim No. (1) in which the cam is a linear cam that is reciprocally driven and is formed of a surface parallel to the direction of movement and a slope that slopes downward from one end of the parallel surface. The transportation clamping device described in Section 1.