JPS62180944U - - Google Patents
Info
- Publication number
- JPS62180944U JPS62180944U JP6981786U JP6981786U JPS62180944U JP S62180944 U JPS62180944 U JP S62180944U JP 6981786 U JP6981786 U JP 6981786U JP 6981786 U JP6981786 U JP 6981786U JP S62180944 U JPS62180944 U JP S62180944U
- Authority
- JP
- Japan
- Prior art keywords
- stage
- plate
- thin film
- wafers
- ceramics
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 2
- 239000010409 thin film Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000000919 ceramic Substances 0.000 claims 1
- 229910010272 inorganic material Inorganic materials 0.000 claims 1
- 239000011147 inorganic material Substances 0.000 claims 1
- 238000005498 polishing Methods 0.000 claims 1
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6981786U JPS62180944U (da) | 1986-05-08 | 1986-05-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6981786U JPS62180944U (da) | 1986-05-08 | 1986-05-08 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62180944U true JPS62180944U (da) | 1987-11-17 |
Family
ID=30910890
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6981786U Pending JPS62180944U (da) | 1986-05-08 | 1986-05-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62180944U (da) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001006559A1 (en) * | 1999-07-15 | 2001-01-25 | Ibiden Co., Ltd. | Wafer prober |
-
1986
- 1986-05-08 JP JP6981786U patent/JPS62180944U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2001006559A1 (en) * | 1999-07-15 | 2001-01-25 | Ibiden Co., Ltd. | Wafer prober |