JPS62180168A - Sealing mechanism for vacuum vessel - Google Patents

Sealing mechanism for vacuum vessel

Info

Publication number
JPS62180168A
JPS62180168A JP61019580A JP1958086A JPS62180168A JP S62180168 A JPS62180168 A JP S62180168A JP 61019580 A JP61019580 A JP 61019580A JP 1958086 A JP1958086 A JP 1958086A JP S62180168 A JPS62180168 A JP S62180168A
Authority
JP
Japan
Prior art keywords
vacuum
gaskets
vacuum vessel
vacuum container
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP61019580A
Other languages
Japanese (ja)
Inventor
Masanori Onozuka
小野塚 正紀
Takashi Uchikawa
内川 高志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Heavy Industries Ltd
Original Assignee
Mitsubishi Heavy Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Heavy Industries Ltd filed Critical Mitsubishi Heavy Industries Ltd
Priority to JP61019580A priority Critical patent/JPS62180168A/en
Publication of JPS62180168A publication Critical patent/JPS62180168A/en
Pending legal-status Critical Current

Links

Classifications

    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02EREDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00Energy generation of nuclear origin
    • Y02E30/10Nuclear fusion reactors

Landscapes

  • Gasket Seals (AREA)

Abstract

PURPOSE:To improve sealing quality for a vacuum vessel by providing double gaskets to be arranged at both internal and external sides on the joint surfaces of connection flanges, and forming an intermediate gas chamber sealed with the same kind of gases as those in the vacuum vessel between both of said gaskets. CONSTITUTION:At the joint surfaces of connection flanges 21a and 22a for vacuum vessel, there are double gaskets 31 and 32 provided for arrangement on both internal and external sides. And an intermediate gas chamber 33 sealed with the same kind of gases as those in said vessel is formed between both gaskets 31 and 32. Consequently, as the gaskets 31 and 32 are double-structured, a leak amount is reduced and outside air is thinned through the mixing thereof with gases in the intermediate chamber 33, even if there is an ingress of outside air due to a leak, thereby keeping the inside of the vacuum vessel almost free from an ingress of outside air.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 本発明は、たとえば核融合装置のプラズマ閉じ込め用真
空容器等の真空容器に適用される真空容器用シール機構
に関する。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a sealing mechanism for a vacuum vessel, which is applied to a vacuum vessel such as a vacuum vessel for plasma confinement of a nuclear fusion device.

〔従来の技術〕[Conventional technology]

第3図は核融合装置のプラズマ閉じ込め用真空容器の一
例を示す斜視図である。第3図に示すように、一般にこ
の種の真空容器10は、装置および容器の製作0組立て
上の要請あるいは電気絶縁の必要性等から、複数たとえ
ば3個に分割された真空容器構成部材11.12.13
を、接合用フ ゛ランジ部14.15において気密に接
合することにより形成されている。したがって接合用7
ランジ部14.15には真空シール機構が必ず心皿であ
る。また真空容器10ヘポート16を取付けのためのフ
ランジ部17にも真空シール機構が必要である。
FIG. 3 is a perspective view showing an example of a vacuum vessel for plasma confinement of a nuclear fusion device. As shown in FIG. 3, this type of vacuum vessel 10 is generally divided into a plurality of, for example, three, vacuum vessel constituent members 11. 12.13
are formed by airtightly joining them at the joining flange portions 14 and 15. Therefore, for joining 7
The vacuum sealing mechanism in the flange 14.15 is necessarily a core plate. Further, a vacuum sealing mechanism is also required for the flange portion 17 for attaching the port 16 to the vacuum container 10.

第4図は従来のこの種の真空シール機構の一例を示す断
面図である。第4図において21aは一方の真空容器構
成部材を示し、21bはその接合用フランジを示してい
る。また22aは他方の真空容器構成部材を示し、22
bはその接合用フランジを示している。23は両フラン
ジ間に介在させたガスケットであり、24は締付はボル
トである。かくして締付はボルト24による締付は操作
を行なうことによって、ガスケツ1−23による真空シ
ールを行なっている。
FIG. 4 is a sectional view showing an example of a conventional vacuum sealing mechanism of this type. In FIG. 4, 21a indicates one of the vacuum vessel constituent members, and 21b indicates a joining flange thereof. Further, 22a indicates the other vacuum container component;
b indicates the joining flange. 23 is a gasket interposed between both flanges, and 24 is a bolt for tightening. Thus, by tightening the bolt 24, a vacuum seal is created by the gasket 1-23.

第5図は従来のこの種の真空シール機構の他の例を示す
断面図である。第5図に示す真空シール機構は、第4図
に示す真空シール機構に、電気絶縁手段を付加したシー
ル機構である。第5図において23a、23bは一対の
ガスケットであり、25は両フランジ間に介在させた絶
縁板であり、26は締付はボルト24に嵌合させた絶縁
筒であり、27は絶縁ワッシャである。かくして上記絶
縁板25.絶縁筒2′6.絶縁ワッシャ27によってフ
ランジ21bと22bとの間の絶縁を確保すると共に、
締付はボルト24の締付は操作を行なうことによって、
ガスケット23a、23bによる真空シールを行なって
いる。
FIG. 5 is a sectional view showing another example of a conventional vacuum sealing mechanism of this type. The vacuum seal mechanism shown in FIG. 5 is a seal mechanism in which electrical insulation means is added to the vacuum seal mechanism shown in FIG. 4. In Fig. 5, 23a and 23b are a pair of gaskets, 25 is an insulating plate interposed between both flanges, 26 is an insulating cylinder fitted with a bolt 24 for tightening, and 27 is an insulating washer. be. Thus, the insulating plate 25. Insulating cylinder 2'6. Insulation washer 27 ensures insulation between flanges 21b and 22b, and
Tightening is done by operating the bolt 24.
Vacuum sealing is performed using gaskets 23a and 23b.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

第4図あるいは第5図に示した構成のものでは、ガスケ
ット23と7ランジ21t)、22bとの間あるいはガ
スケット23a、23bと絶縁板25との間を、高い信
頼性で真空シールすることが必ずしも容易ではない。特
にフランジ21b。
With the configuration shown in FIG. 4 or FIG. 5, it is possible to vacuum-seal with high reliability between the gasket 23 and the seven langes 21t) and 22b or between the gaskets 23a and 23b and the insulating plate 25. It's not always easy. Especially the flange 21b.

22bが大型化する場合や第5図のように絶縁部材を介
在させる場合においては、製作時、組立て時、および運
転時等において、若干のリークが生じるのを逸れ得ない
。しかるに核融合装置においては、リークにより僅かの
大気が真空容器内に侵入しただけでも、プラズマに対す
る不純物の介入となるため大きな悪影響が生じることに
なる。したがってこれを確実に防止する必要がある。
When the size of 22b is increased or when an insulating member is interposed as shown in FIG. 5, it is inevitable that some leakage will occur during manufacturing, assembly, and operation. However, in a nuclear fusion device, even a small amount of air entering the vacuum vessel due to a leak causes impurities to interfere with the plasma, resulting in a large adverse effect. Therefore, it is necessary to reliably prevent this.

そこで本発明は、たとえガスケットによるシール機能が
不十分であっても、真空容器内への不純物の侵入という
事態を回避でき、真空容器としての機能を損うおそれの
ない真空容器用シールIFN@を提供することを目的と
する。
Therefore, the present invention has developed a vacuum container seal IFN@ which can prevent impurities from entering the vacuum container even if the sealing function of the gasket is insufficient, and which does not pose a risk of impairing the function of the vacuum container. The purpose is to provide.

〔問題点を解決するための手段〕[Means for solving problems]

本発明は上記問題点を解決し目的を達成するために、次
のような手段を講じた。すなわち、接合すべき一対の真
空容器構成部材の各接合用フランジの接合面を、気密に
シールする真空容器用シール機構において、■前記各接
合用フランジの接合面相互間の内方部位と外方部位とに
ガスケットを二重に設ける。■この二重のガスケットの
中間に、内部に前記真空容器内に封入される気体と同種
類の気体を封入される中間気体室を設ける。
In order to solve the above-mentioned problems and achieve the object, the present invention takes the following measures. That is, in a vacuum container sealing mechanism that airtightly seals the joining surfaces of each joining flange of a pair of vacuum container constituent members to be joined, (1) the inner part and the outer part between the joining surfaces of each joining flange; Provide double gaskets in both parts. (2) An intermediate gas chamber is provided in the middle of this double gasket, which is filled with the same type of gas as the gas sealed in the vacuum container.

〔作用〕[Effect]

ガスケットが二重構造となっているので、リーク量その
ものが微少量に抑制される上、リークによる外気の侵入
があっても、その外気は中間気体室内の気体により薄め
られるので、真空容器内へ侵入する気体の主成分は真空
容器内に封入される気体とほぼ同じものとなる。
Since the gasket has a double structure, the amount of leakage itself is suppressed to a very small amount, and even if outside air enters due to a leak, the outside air will be diluted by the gas in the intermediate gas chamber, so it will not leak into the vacuum container. The main component of the invading gas is almost the same as the gas sealed in the vacuum container.

〔実施例〕〔Example〕

第1図は本発明の第1実施例を示す図である。 FIG. 1 is a diagram showing a first embodiment of the present invention.

なお第4図と同一部分には同一符号を付し詳細な説明は
省略する。第1因に示すように、各接合用フランジ21
a、22aの接合面相互間の内方部位には第1のガスケ
ット31が設けられ、外方部位には第2のガスケット3
2が設けられ、ガスケットが二重構造のものとなってい
る。この二重構造のガスケット31.32の中間には、
中間気体室33が設けられている。中間気体室33の内
部には、真空容器内に封入される気体と同種類の気体(
核融合装置の真空容器においては主として水素1重水素
、三重水素、などの水素同位体)が一定圧力で封入され
ている。なお上記圧力は、大気圧よりも低い圧力に設定
されている。  。
Note that the same parts as in FIG. 4 are given the same reference numerals and detailed explanations will be omitted. As shown in the first factor, each joining flange 21
A first gasket 31 is provided at the inner portion between the joint surfaces of a and 22a, and a second gasket 3 is provided at the outer portion.
2 is provided, and the gasket has a double structure. In the middle of this double structure gasket 31 and 32,
An intermediate gas chamber 33 is provided. Inside the intermediate gas chamber 33, the same type of gas as the gas sealed in the vacuum container (
In the vacuum vessel of a nuclear fusion device, hydrogen (hydrogen, hydrogen isotopes such as deuterium, tritium, etc.) is sealed at a constant pressure. Note that the above pressure is set to be lower than atmospheric pressure. .

上記構成の本シール機構においては、ガスケット31.
32のシール機能が不十分なためにリークが生じ、真空
容器内へ外気が侵入しようとしても、外気が中間気体室
33内の気体により薄められるので、真空容器内に侵入
する気体の主成分は、真空容器内に元来封入される気体
と同一の種類のものとなる。このため真空容器内への不
純物浸入□による悪影響は著しく軽減される。また第1
.第2のガスケット31.32によりガスケットが二重
構造となっている上、中間気体室33内の気体の圧力は
大気圧よりも低い状態に設定されて;・るので、真空容
器内へのリークは十分小さく抑制される。
In this seal mechanism having the above configuration, the gasket 31.
Even if a leak occurs due to the insufficient sealing function of the vacuum chamber 32 and outside air tries to enter the vacuum chamber, the outside air is diluted by the gas inside the intermediate gas chamber 33, so the main component of the gas that enters the vacuum chamber is , the same type of gas as originally sealed in the vacuum container. Therefore, the adverse effects of impurities entering the vacuum container are significantly reduced. Also the first
.. The gasket has a double structure with the second gasket 31 and 32, and the pressure of the gas in the intermediate gas chamber 33 is set to be lower than atmospheric pressure; therefore, leakage into the vacuum container is prevented. is kept sufficiently small.

第2図は本発明の第2実施例を示す断面図である。この
実施例が前記第1実施例と異なる点は、中間気体至33
に注排気管34を接続し、中間気体室33内の気体の排
気および注入を常時性なえるようにした点である。
FIG. 2 is a sectional view showing a second embodiment of the present invention. This embodiment differs from the first embodiment in that the intermediate gas to 33
An inlet/exhaust pipe 34 is connected to the intermediate gas chamber 33 so that the gas in the intermediate gas chamber 33 can be constantly exhausted and injected.

このように構成された本実施例においては、使用に際し
てまず注排気管34を通じて中間気体室33内の大気を
真空容器内に封入される気体と強制置換し、しかるのち
注排気管34を通じて排気しながら同種気体の注入を行
ない、中間気体室33内が常に一定圧力の所定の気体で
満たされるようにする。したがって本実施例によれば、
第2のガスケット32の小規模なリークにより外部から
大気の侵入があっても、中間気体室33内は常に同種気
体による換気が行なわれているので、中間気体室33内
に残留する大気の量は相対的に少ないものとなる。この
ため第1のガスケット31を介して真空容器内に侵入す
る大気成分はほぼ零に近いものとなる。上記以外は前記
第1実施例と同様の作用効果を奏するのは勿論である。
In this embodiment configured as described above, in use, first, the atmosphere in the intermediate gas chamber 33 is forcibly replaced with the gas sealed in the vacuum container through the inlet/exhaust pipe 34, and then the air is exhausted through the inlet/exhaust pipe 34. At the same time, the same kind of gas is injected so that the interior of the intermediate gas chamber 33 is always filled with a predetermined gas at a constant pressure. Therefore, according to this embodiment,
Even if air enters from the outside due to a small leak in the second gasket 32, the amount of air remaining in the intermediate gas chamber 33 is maintained because the inside of the intermediate gas chamber 33 is always ventilated with the same type of gas. is relatively small. Therefore, the amount of atmospheric components that enter the vacuum container through the first gasket 31 is close to zero. Of course, other than the above, the same operation and effect as the first embodiment is achieved.

なお本発明は前記各実施例に限定されるものではない。Note that the present invention is not limited to the above embodiments.

例えば前記実施例では第1.第2のガスゲット31.3
2をそれぞれ単一のガスケットにより構成した場合を示
したが、第1.第2のガスケット31.32をそれぞれ
複数のガスケットにより構成してもよい。また中間気体
W33も同様に複数個設けるようにしてもよい。さらに
前記実施例では本発明を絶縁部材を介在させていないフ
ランジ部に適用した場合を例示したが、絶縁部材を介在
させた型式のフランジ部にも適用可能であるのは勿論で
ある。このほか本発明の要旨を逸脱しない範囲で種々変
形実施可能であるのは勿論である。
For example, in the above embodiment, the first. Second gas get 31.3
2 are each configured with a single gasket, but 1. Each of the second gaskets 31, 32 may be composed of a plurality of gaskets. Similarly, a plurality of intermediate gases W33 may be provided. Further, in the above embodiments, the present invention is applied to a flange portion without an insulating member, but it is of course applicable to a flange portion having an insulating member interposed therebetween. It goes without saying that various other modifications can be made without departing from the gist of the present invention.

〔発明の効果〕〔Effect of the invention〕

本発明によれば、各接合用フランジの接合面相互間の内
方部位と外方部位とにガスケットを二重に設け、この二
重のガスケットの中間に、内部に前記真空容器内に封入
される気体と同種類の気体を封入される中間気体空を設
けるようにしたので、ガスケットが二重構造となってい
ることから、リーク量そのものが微少量に抑制される上
、リークによる外気の侵入があっても、その外気は中間
気体空白の気体により薄められ、真空容器内へ侵入する
気体の主成分は真空容器内に封入される気体とほぼ同じ
ものとなる。かくして、たとえガスケットによるシール
機能が不十分であっても、真空容器内への不純物の侵入
という事態を回避でき、真空容器としての機能を損うお
それのない真空容器用シール機構を提供できる。
According to the present invention, double gaskets are provided at the inner part and the outer part between the joining surfaces of each joining flange, and the gasket is placed between the double gaskets and is sealed inside the vacuum container. Since we have created an intermediate gas space that is filled with the same type of gas as the gas being used, the gasket has a double structure, so the amount of leakage itself is suppressed to a very small amount, and the intrusion of outside air due to leakage is also prevented. Even if there is, the outside air will be diluted by the gas in the intermediate gas gap, and the main component of the gas entering the vacuum container will be almost the same as the gas sealed inside the vacuum container. In this way, even if the sealing function of the gasket is insufficient, it is possible to prevent impurities from entering the vacuum container, and it is possible to provide a sealing mechanism for a vacuum container that is free from the risk of impairing the function of the vacuum container.

【図面の簡単な説明】[Brief explanation of drawings]

第1図は本発明の第1実施例を示す断面図、第2図は本
発明の第2実施例を示す断面図である。 第3図は核融合装置用の真空容器の一例を示す斜視図、
第4図および第5図はそれぞれ従来の真空シール機構の
異なる例を示す断面図である。 10・・・真空容器、11,12.13・・・真空容器
構成部材、14.15・・・フランジ部、16・・・ボ
ート、17・・・フランジ部、21a、22a・・・真
空容器構成部材、21b、22b・・・フランジ、23
゜23a、23b・・・ガスケット、24・・・締付は
ボルト、25・・・絶縁板、26・・・絶縁筒、27・
・・絶縁ワッシャ、31・・・第1のガスケット、32
・・・第2のガスケット、33・・・中間気体室、34
・・・注排気管。
FIG. 1 is a sectional view showing a first embodiment of the invention, and FIG. 2 is a sectional view showing a second embodiment of the invention. FIG. 3 is a perspective view showing an example of a vacuum container for a nuclear fusion device;
4 and 5 are cross-sectional views showing different examples of conventional vacuum seal mechanisms, respectively. DESCRIPTION OF SYMBOLS 10... Vacuum container, 11, 12.13... Vacuum container component, 14.15... Flange part, 16... Boat, 17... Flange part, 21a, 22a... Vacuum container Component members, 21b, 22b...flange, 23
゜23a, 23b... Gasket, 24... Tighten with bolt, 25... Insulating plate, 26... Insulating cylinder, 27...
...Insulating washer, 31...First gasket, 32
...Second gasket, 33...Intermediate gas chamber, 34
...Injection and exhaust pipes.

Claims (1)

【特許請求の範囲】[Claims] 接合すべき一対の真空容器構成部材の各接合用フランジ
の接合面を、気密にシールする真空容器用シール機構に
おいて、前記各接合用フランジの接合面相互間の内方部
位と外方部位とに設けられた二重のガスケットと、この
二重のガスケットの中間に設けられ内部に前記真空容器
内に封入される気体と同種類の気体を封入される中間気
体室とを具備したことを特徴とする真空容器用真空シー
ル機構。
In a vacuum container sealing mechanism that airtightly seals the joining surfaces of each joining flange of a pair of vacuum container constituent members to be joined, an inner region and an outer region between the joining surfaces of each joining flange are provided. A double gasket is provided, and an intermediate gas chamber is provided between the double gaskets and is filled with the same type of gas as the gas sealed in the vacuum container. Vacuum seal mechanism for vacuum containers.
JP61019580A 1986-01-31 1986-01-31 Sealing mechanism for vacuum vessel Pending JPS62180168A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61019580A JPS62180168A (en) 1986-01-31 1986-01-31 Sealing mechanism for vacuum vessel

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61019580A JPS62180168A (en) 1986-01-31 1986-01-31 Sealing mechanism for vacuum vessel

Publications (1)

Publication Number Publication Date
JPS62180168A true JPS62180168A (en) 1987-08-07

Family

ID=12003206

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61019580A Pending JPS62180168A (en) 1986-01-31 1986-01-31 Sealing mechanism for vacuum vessel

Country Status (1)

Country Link
JP (1) JPS62180168A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5368648A (en) * 1991-02-26 1994-11-29 Tokyo Electron Sagami Kabushiki Kaisha Sealing apparatus
US5533736A (en) * 1992-06-01 1996-07-09 Tokyo Electron Kabushiki Kaisha Thermal processing apparatus
JP2002293290A (en) * 2001-03-19 2002-10-09 L-3 Communications Corp Reinforced type voyage data recording device
JP2010107052A (en) * 2010-02-15 2010-05-13 Kawasaki Precision Machinery Ltd Sealing structure for gas
CN101881335A (en) * 2010-03-23 2010-11-10 东莞宏威数码机械有限公司 Multilayer rubber sealing ring sealing device
KR102095864B1 (en) * 2019-01-11 2020-04-01 (주)엘오티씨이에스 Piping apparatus using hybrid seal and facility for treating harmful gas having the same

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5368648A (en) * 1991-02-26 1994-11-29 Tokyo Electron Sagami Kabushiki Kaisha Sealing apparatus
US5533736A (en) * 1992-06-01 1996-07-09 Tokyo Electron Kabushiki Kaisha Thermal processing apparatus
US5884917A (en) * 1992-06-01 1999-03-23 Tokyo Electron Tohoku Kabushiki Kaisha Thermal processing apparatus
JP2002293290A (en) * 2001-03-19 2002-10-09 L-3 Communications Corp Reinforced type voyage data recording device
JP2010107052A (en) * 2010-02-15 2010-05-13 Kawasaki Precision Machinery Ltd Sealing structure for gas
CN101881335A (en) * 2010-03-23 2010-11-10 东莞宏威数码机械有限公司 Multilayer rubber sealing ring sealing device
KR102095864B1 (en) * 2019-01-11 2020-04-01 (주)엘오티씨이에스 Piping apparatus using hybrid seal and facility for treating harmful gas having the same

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