JPS62180066U - - Google Patents
Info
- Publication number
- JPS62180066U JPS62180066U JP6678286U JP6678286U JPS62180066U JP S62180066 U JPS62180066 U JP S62180066U JP 6678286 U JP6678286 U JP 6678286U JP 6678286 U JP6678286 U JP 6678286U JP S62180066 U JPS62180066 U JP S62180066U
- Authority
- JP
- Japan
- Prior art keywords
- film
- vacuum chamber
- processed
- vacuum
- upper space
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000015572 biosynthetic process Effects 0.000 claims 1
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6678286U JPS62180066U (ro) | 1986-04-30 | 1986-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6678286U JPS62180066U (ro) | 1986-04-30 | 1986-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62180066U true JPS62180066U (ro) | 1987-11-16 |
Family
ID=30905095
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6678286U Pending JPS62180066U (ro) | 1986-04-30 | 1986-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62180066U (ro) |
-
1986
- 1986-04-30 JP JP6678286U patent/JPS62180066U/ja active Pending