JPS62179536U - - Google Patents

Info

Publication number
JPS62179536U
JPS62179536U JP6516786U JP6516786U JPS62179536U JP S62179536 U JPS62179536 U JP S62179536U JP 6516786 U JP6516786 U JP 6516786U JP 6516786 U JP6516786 U JP 6516786U JP S62179536 U JPS62179536 U JP S62179536U
Authority
JP
Japan
Prior art keywords
air
ceiling
hepa filter
clean room
injection nozzle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6516786U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0311645Y2 (US08177716-20120515-C00003.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986065167U priority Critical patent/JPH0311645Y2/ja
Publication of JPS62179536U publication Critical patent/JPS62179536U/ja
Application granted granted Critical
Publication of JPH0311645Y2 publication Critical patent/JPH0311645Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Ventilation (AREA)
JP1986065167U 1986-05-01 1986-05-01 Expired JPH0311645Y2 (US08177716-20120515-C00003.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986065167U JPH0311645Y2 (US08177716-20120515-C00003.png) 1986-05-01 1986-05-01

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986065167U JPH0311645Y2 (US08177716-20120515-C00003.png) 1986-05-01 1986-05-01

Publications (2)

Publication Number Publication Date
JPS62179536U true JPS62179536U (US08177716-20120515-C00003.png) 1987-11-14
JPH0311645Y2 JPH0311645Y2 (US08177716-20120515-C00003.png) 1991-03-20

Family

ID=30901992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986065167U Expired JPH0311645Y2 (US08177716-20120515-C00003.png) 1986-05-01 1986-05-01

Country Status (1)

Country Link
JP (1) JPH0311645Y2 (US08177716-20120515-C00003.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012241961A (ja) * 2011-05-18 2012-12-10 Panasonic Corp クリーンルームの逆流防止装置
JP2017219207A (ja) * 2016-06-03 2017-12-14 ダイキン工業株式会社 食品の搬送式冷却システム

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6048431A (ja) * 1983-08-24 1985-03-16 Sanki Eng Co Ltd クリ−ンル−ムに発生する渦気流の消去方法

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6048431A (ja) * 1983-08-24 1985-03-16 Sanki Eng Co Ltd クリ−ンル−ムに発生する渦気流の消去方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012241961A (ja) * 2011-05-18 2012-12-10 Panasonic Corp クリーンルームの逆流防止装置
JP2017219207A (ja) * 2016-06-03 2017-12-14 ダイキン工業株式会社 食品の搬送式冷却システム

Also Published As

Publication number Publication date
JPH0311645Y2 (US08177716-20120515-C00003.png) 1991-03-20

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