JPS62178928A - Manufacture of liquid crystal display body - Google Patents

Abstract

PURPOSE:To make up the yield by converting all to a black defect which is unattractive as a vision, by converting a white defect to the black defect by using a negative display of a color and a laser beam. CONSTITUTION:An electrode pattern 5 containing an element 3 is formed on an insulating substrate 1, an electrode pattern 4 and a color filter 7 are formed on the other insulating substrate 1 and an orientation film for orienting horizontally a TN liquid crystal is formed on two pieces of substrates. Subsequently, two pieces of substrates are formed as one body through a joining material with its electrode pattern surface inside and at a prescribed interval by which each electrode pattern holds a prescribed position and also goes to a liquid crystal layer, the TN liquid crystal is enclosed in a liquid crystal layer and polarizing plates 9, 10 are stuck to a parallel nicol by placing a cell between them. A liquid crystal display body which is competed in such a way is lighted and a white defect and a black defect whose total number is about several pieces are selected, and a wiring for connecting an MIM element of a part which is a white defect, and a picture element, or each picture element being in a prescribed position and a terminal, and the MIM element are disconnected by a laser beam. Also, as for a part which has gone to the white defect due to a residual film, the laser beam is irradiated to the residual film.

Description

Detailed Description of the Invention [Industrial Field of Application] The present invention relates to a method for manufacturing an MIM liquid crystal display [Summary of the Invention] The present invention provides a method for manufacturing an MIM liquid crystal display,
The presence of defects is detected by electrically disconnecting white defects using a laser beam and converting them into black defects, which are defects that are recommended to have a whiter contrast than the surrounding area on the display using a full-color image surface or film residue controlled by the device. This is intended to visually enhance the production yield.

[Conventional technology]

The conventional manufacturing method for MIM liquid crystal displays is
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097-966x", P, 307, Fig. 9, there was no process of converting defects using a laser beam or the like in positive display.

[Problem that the invention seeks to solve]

However, the conventional technology has a problem in that defects that occur for some reason during manufacturing cannot be replaced, and black defects and white defects coexist, reducing manufacturing yield. Therefore, the present invention converts white defects into black defects using a color negative display and a laser beam, thereby making all the black defects visually inconspicuous and compensating for production yields, thereby mass producing MIM liquid crystal displays. The purpose is to make it possible.

[Means to solve the problem]

The method for manufacturing a liquid crystal display of the present invention includes the steps of α) a step of forming an electrode pattern including the element on an insulating substrate; b) a step of forming an electrode pattern and a color filter on the other insulating substrate; and C) horizontally aligning TN liquid crystal on the two substrates. a step of forming an alignment film, and d) a step of integrating the two substrates with the electrode pattern surfaces inside, each electrode pattern maintaining a predetermined position, and a predetermined interval to form a liquid crystal layer via a bonding material. and 6) a step of enclosing a TN liquid crystal in the liquid crystal layer; f) a step of sandwiching and bonding the cell with a polarizing plate in parallel Nicols; I) The element has lost its non-linearity due to destruction of the insulating film constituting the MIM element, or the operating characteristics of the element have changed from the predetermined characteristics due to the remaining metal film constituting the MIM and pixels in addition to the predetermined pattern formed by photolithography. The present invention is characterized by comprising a step of selectively irradiating the remaining film with a laser beam when the film deviates, and electrically breaking the wire by sublimating the metal in the irradiated portion with heat.

[Effect]

According to the above configuration of the present invention, in a negative display, the contrast changes from black to white when a voltage is applied to the liquid crystal layer.
All defects can be converted into black defects by disconnecting the MIM element and the wiring connecting each pixel and the terminal at a predetermined position and the MIM element using heat from a laser beam. On the other hand, when comparing white defects and black defects in terms of visual conspicuousness, in color displays, the light from the backlight at the rear of the panel is transmitted through the liquid crystal layer, so white defects are The difference is that it is easier to recognize than a black defect due to light leakage. As described above, a panel in which a white defect, which is a fatal defect, has occurred can be converted to a black defect to compensate for the yield.

〔Example〕

Examples based on the present invention will be described in detail below.

Using a glass substrate as an insulating substrate, the MIMX element is made by forming tantalum on the glass substrate with a film thickness of 5000X or less by sputtering, forming a predetermined pattern by photolithography, and then anodizing with a citric acid solution. Tantalum pentoxide is formed on the surface of the tantalum to a thickness of 1000x or less, and then chromium is formed on the surface of the substrate to a thickness of 3000x or less by vapor deposition or sputtering, and a predetermined pattern is formed by photolithography. An MIM device was obtained. Next, TO was formed into a film with a thickness of 2000X or less using a sputtering method or a vapor deposition method, and a pixel 11L pole was formed by photolithography. A cross-sectional view of the substrate at this time is shown in FIG.

Now, regarding the other insulating substrate, a glass substrate was also used, and a film of tin oxide by the CVD method or TO by the sputtering method was formed with a thickness of 2000λ or less, and an electrode pattern was formed by photolithography. Thereafter, a color filter consisting of red, green, and blue, which are the three color elements, was formed on the electrode pattern with a film thickness of 2 μm or less using an additive coloring method. A cross-sectional view of the substrate at this time is shown in Figure 2. .

After the two substrates produced in this manner were treated with aminosilane, a zariimide film was formed to a thickness of 2000× or less, and an alignment film with horizontal alignment was formed by a rubbing method.

Next, Micropearl (registered trademark of Building Blocks Fine Chemicals)
The liquid crystal layer is formed on two substrates using a thermosetting or ultraviolet curable bonding material while maintaining a predetermined distance between them. It was integrated using

Further, a predetermined amount of liquid crystal was dropped into the liquid crystal filling port in a vacuum to seal the cell thus manufactured, and then the liquid crystal filling port was sealed using an epoxy-based or ultraviolet-curable acrylic adhesive.

Next, polarizing plates were adhered to both sides of the liquid crystal cell in a parallel Nicol pattern to complete a liquid crystal display. A cross-sectional view of the substrate at this time is shown in FIG.

Now, the liquid crystal display thus completed is turned on to select those with a total number of white defects and black defects, and the selected liquid crystal surface is placed in a device called laser repair for photomask repair, and the liquid crystal display is turned on. A laser beam was used to disconnect the MIM element and the wiring connecting the MIM element and the pixel or each pixel at a predetermined position and the terminal at a location that was a white defect in the inspection, and the defect was converted to a black defect. Areas where the film remained as white defects were converted to black defects by irradiating the film with a laser beam, but those with a small amount of film remaining recovered to normal defects. I saw some things.

As described above, we were able to make manufacturing defects less noticeable and compensate for the yield.

〔Effect of the invention〕

As described above, according to the present invention, since a negative display is used, the pixel gap is shielded from light, and unnecessary light leakage is eliminated, so that the displayed image can be seen clearly. MI
This compensates for the manufacturing yield of liquid crystal displays using M elements and enables mass production.

[Brief explanation of drawings]

FIG. 1 is a cross-sectional view of the MIM element side substrate. 1...MIM element 2...Eng TO pixel electrode 3...Glass substrate 4... Wiring electrode FIG. 2 is a sectional view of the color filter side substrate. 1...One layer of color filters 2......TO scanning electrode 3...Glass substrate FIG. 5 is a sectional view of the liquid crystal display. 1...Glass substrate 2...Spacer 3...MIM Yuiko 4......To scan electrode 5......TO pixel electrode 6... Wiring electrode 7... Color filter layer 8...Liquid crystal layer 9... Upper polarizing plate 10...Lower polarizing plate that's all Applicant: Seiko Epson Corporation Figure 2 Q-Ha Kufui 1 Seabird display 41fT Fig.

Claims (1)

[Claims] A method for manufacturing a liquid crystal display having an MIM element inside a base body and having a mechanism for controlling applied voltage to a liquid crystal layer using the nonlinearity of the element, which includes: a) an MIM element on an insulating substrate; a step of forming an electrode pattern including the element; b) a step of forming an electrode pattern and a color filter on the other insulating substrate; c) forming an alignment film for horizontally aligning the TN liquid crystal on the two substrates. d) A step of integrating the two substrates with the electrode patterns facing inside at a predetermined interval with each electrode pattern in a predetermined position and forming a liquid crystal layer via a bonding material; and e) a step of sealing a TN liquid crystal in the liquid crystal layer; f) a step of sandwiching and bonding a polarizing plate to the cell in parallel Nicols; and g) a step of sealing the MIM device or photodiode which has lost its nonlinearity due to destruction of the insulating film constituting the device. Selectively irradiating the remaining film with a laser beam when the operating characteristics of the element deviate from the predetermined characteristics due to the remaining metal film constituting the MIM and the pixel in addition to the predetermined pattern in lithography;
1. A method for manufacturing a liquid crystal display, comprising the step of sublimating metal in the irradiated portion with heat to electrically disconnect the wire.