JPS621780U - - Google Patents
Info
- Publication number
- JPS621780U JPS621780U JP9158485U JP9158485U JPS621780U JP S621780 U JPS621780 U JP S621780U JP 9158485 U JP9158485 U JP 9158485U JP 9158485 U JP9158485 U JP 9158485U JP S621780 U JPS621780 U JP S621780U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- roller
- roll coater
- transfer device
- transfer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 239000011248 coating agent Substances 0.000 claims description 5
- 238000000576 coating method Methods 0.000 claims description 5
- 239000007788 liquid Substances 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985091584U JPS6236541Y2 (da) | 1985-06-19 | 1985-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1985091584U JPS6236541Y2 (da) | 1985-06-19 | 1985-06-19 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS621780U true JPS621780U (da) | 1987-01-08 |
| JPS6236541Y2 JPS6236541Y2 (da) | 1987-09-17 |
Family
ID=30647604
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1985091584U Expired JPS6236541Y2 (da) | 1985-06-19 | 1985-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6236541Y2 (da) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007296462A (ja) * | 2006-04-28 | 2007-11-15 | Fujifilm Corp | 塗布方法及び装置並びに塗布ライン用ローラ |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5224505A (en) * | 1975-08-19 | 1977-02-24 | Matsushita Electric Ind Co Ltd | Tape guide |
| JPS5954563U (ja) * | 1982-09-30 | 1984-04-10 | 株式会社東芝 | 現像およびエツチング装置 |
| JPS60103352A (ja) * | 1983-11-11 | 1985-06-07 | Tokyo Ohka Kogyo Co Ltd | フオトレジスト形成用積層板製造装置 |
-
1985
- 1985-06-19 JP JP1985091584U patent/JPS6236541Y2/ja not_active Expired
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5224505A (en) * | 1975-08-19 | 1977-02-24 | Matsushita Electric Ind Co Ltd | Tape guide |
| JPS5954563U (ja) * | 1982-09-30 | 1984-04-10 | 株式会社東芝 | 現像およびエツチング装置 |
| JPS60103352A (ja) * | 1983-11-11 | 1985-06-07 | Tokyo Ohka Kogyo Co Ltd | フオトレジスト形成用積層板製造装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007296462A (ja) * | 2006-04-28 | 2007-11-15 | Fujifilm Corp | 塗布方法及び装置並びに塗布ライン用ローラ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6236541Y2 (da) | 1987-09-17 |