JPS62177844A - Penta-shaft manipulator - Google Patents

Abstract

PURPOSE:To realize a manipulator to make it possible to operate five shafts separately in a vacuum, by applying double shafts and rotation delivery devices. CONSTITUTION:On a y stage 3, a z stage 8 is installed, and driven in the direction of z by a linear bearing. When a rotation introducing device 7z at the atmospheric side is rotated, a shaft 6x is rotated through a vacuum sealing. A rotation direction converting mechanism 9 converts the rotation direction by 90 deg. through a bevel gear. The rotation of the rotation introducing device 7z is delivered to rotary motion-linear motion converting devices 4 and 5 to drive the z stage 8. The structures of the shafts 6x and 6y are the same as the shaft 6, and, a theta driving mechanism and a psi driving mechanism are constructed on the y stage 3. In the theta driving mechanism, are furnished the rotation direction converting mechanism 9theta, a shaft 6theta, and rotation direction converting mechanisms 12A and 12B, at the front side of the shaft 6y, and the whole of the structure 14 including 10A, 12A, 10C, 11, and 15 can be rotated.

Description

DETAILED DESCRIPTION OF THE INVENTION [Industrial Field of Application] The present invention relates to observation of a sample in vacuum, especially any 11!
The present invention relates to a five-axis manipulator that has a suitable function for selecting observation points and observation directions, and is suitable for use in devices that handle charged particle beams.

[Conventional technology]

In conventional equipment, x, y, z, and θ are measured in ultra-high vacuum.

It was difficult to provide each of the five degrees of freedom of ψ independently. In devices such as general electron microscopes that require a low degree of vacuum, it is relatively easy to provide five degrees of freedom using O-rings, etc. However, in ultra-high vacuum, it is possible to provide five degrees of freedom using O-rings. It was impossible to use. The advantages of the present invention are significant.

[Problem that the invention seeks to solve]

The present invention has been made in order to obtain a manipulator that can easily realize the selection of an analysis location and 111 observation direction when observing a sample in an ultra-high vacuum. For example, in electron diffraction, it is important to know where you are looking at the sample and from what direction.
．． It is determined by giving five parameters of ψ. In the present invention, these five parameters are independently and
It is an object of the present invention to provide a manipulator that makes it possible to apply the effects with good reproducibility.

Means for Solving Problem C] The manipulator of the present invention uses a double shaft consisting of an inner shaft and an outer shaft, which mutually slide in the axial direction but rotate as one,
The drive n+ in the X direction is performed by linear motion given from the outside, but
Driving in the direction is performed by rotating the shaft from the outside using the sliding of a double shaft installed in the X direction.
A system in which double axes are installed in each direction in the X direction and the drawing axis is connected by a rotation transmission mechanism is used to perform axis rotation given from the outside, and 0 rotation is performed by a double axis installed in the X + Y + Z directions and a rotation transmission mechanism. The rotation of ψ is done by the system, and the rotation of ψ is
A system similar to the O rotation mechanism is provided, and the rotational motion is converted into linear motion in the θ-axis direction and then returned to rotational motion.

[Effect]

According to the above configuration, the movement in the X-axis direction is y.

zrOt<P axis can absorb movement in the X-axis direction, giving freedom in the X-axis direction, and when moving in the y-axis direction, z*
Or 'I' has the degree of freedom in the y-axis direction, and furthermore, y, N
When moving in the direction, 0. A degree of freedom in the Z-axis direction is given to ψ. Since θ is a rotation, 0 can be obtained by rotating the axis directly on the Z stage, and r can be obtained by directly rotating the axis of O in the direction of the rotation axis I! It is given by converting the motion into rotational motion to an axis mainly perpendicular to the θ-axis. As a result, x, y, z, 0.
It becomes possible to provide each of the five axes of 'p independently.

[Embodiments of the invention]

An embodiment of the present invention will be explained below with reference to FIGS. 1 to 5. FIG. 1 is a diagram showing the overall configuration. The X stage 2 is assembled on the base 1. The X stage 3 is assembled on the X stage 2, and the 2 stages 8 are assembled on the X stage 3. Furthermore, the θ and ψ rotating parts 14 and 15 are assembled on the two stages 8. This mechanism is installed in a vacuum (particularly in an ultra-high vacuum) and can be driven from outside (atmospheric side) using a rotary introduction machine, a linear introduction machine, etc.

Next, each part will be explained in detail. FIG. 2 shows the operating principle of the X stage 2. A stage 2 is set on a base 1 and has a degree of freedom in one direction (X-axis direction) using a linear bearing such as a cross roller guide. The stage 2 is driven by being introduced into the vacuum from the atmosphere side through the linear introduction mechanism 13.

Note that the base 1 is fixed and does not move. FIG. 3 shows the operating principle of the X stage 3. The stage 3 is placed on the stage 2, and can be moved on the stage 2 in a direction perpendicular to the stage 2 (y-axis direction) using a linear bearing.

When the rotation introduction mechanism 7y set on the atmosphere side is rotated,
The shaft 6 rotates through the vacuum seal. This rotation drives the X stage 3 by a rotational motion-linear motion conversion mechanism. Here, it was used for both the city 5 and the rack 4 as a rotational motion-linear motion conversion mechanism. FIG. 6 is a sectional view of the shaft 6. The shaft 6 is a double shaft. The pin 23 is fixed to the inner shaft 21, and the inner shaft 21 and the outer shaft 22 rotate together, but since the inner shaft 21 has a degree of freedom in the axial direction relative to the outer shaft 22, the stage 2 and stage 3 can be driven independently.

FIG. 4 shows the principle of operation of the two stages 8. The two stages 8 are assembled on one side of the X stage 3, and are driven in two directions by linear bearings. When the rotation introducing mechanism 7z set on the atmosphere side is rotated, @6x rotates through the vacuum seal section. 9 is a mechanism that changes the direction of rotation; here, a double bevel gear is used to change the direction of rotation to 9.
Changed 0°.

The rotation of 7z is transmitted to the rotary operation-linear motion conversion mechanisms 4 and 5 through the shaft 6y, and the two stages 8 are driven. Axis B
The structure of x and 6y is the same as axis 6.

FIG. 5 shows the principle of operation of θ and T. The θ drive mechanism and the ψ drive mechanism are assembled on the X stage 3. Both machines are equipped with the two-stage drive mechanism shown in Figure 4 and the 7zt 6x+ 91
The same is true up to 6y. On the side of the 0 drive machine, there is a rotation direction conversion mechanism 90. shaft 60, rotation direction conversion mechanism 12A,
12B, including 10A, 12A, IOC, 11, and 15]-4 can be rotated as a whole. Here, a bevel toothed skewer was used for 90, and worm gears were used for 12A and 12B.

Shaft 60 has the same structure as shaft 6. In the r drive mechanism, 6y
The structure 15 is rotated by having a rotational direction conversion m structure 9ψ, an axis 6ψ, a rotational motion-linear motion conversion mechanism 10B, an IOA, a linear motion-rotational motion conversion mechanism 10A, and an l0C5 rotational motion transmission mechanism 11. Here, 9ψ is a bevel gear 10A, a shaft with a rack around the entire circumference, IOB, 10G is a spur gear, 1
1, a spur gear was used. FIG. 7 shows a cross section of the rack shaft used in IOA. When the mechanisms explained in FIGS. 2 to 5 are combined as shown in FIG. 1, five independent axes, x, y, and z, are created.

It becomes a manipulator with 0 and ψ. When used in an ultra-high vacuum, it is necessary to carefully examine the material, choose a metal material that releases a small amount of gas, and use it without lubrication.

〔Effect of the invention〕

According to the invention, x, y, Z independently in vacuum.

A manipulator that can move 5#I of θ and r is created. Since each degree of freedom is configured independently, it is easy to create a device having degrees of freedom in six or more axes according to the present invention. In addition, since it adopts a [,tli mechanism, low cost, easy 4e4 processing, high reliability, etc. can be expected.

[Brief explanation of drawings]

Fig. 1 is a perspective view showing the overall configuration of a manipulator according to an embodiment of the present invention, Fig. 2 is an explanatory diagram of the principle of the X stage, Fig. 3 is an explanatory diagram of the principle of the X stage, and Fig. 4 is a diagram of the Z stage. FIG. 5 is an explanatory diagram of the principle of the 0 drive machine ellipse, <P drive mechanism, FIG. 6 is a sectional view of the shaft, and FIG. 7 is a sectional view of the rack shaft. 1...Base, 2...X stage, 3...X stage, 4.5...Rotary motion-linear motion conversion mechanism (e.g. Nirakku and spur gear), 6... Axis, 7y, 7z , 7θ, 7
ψ...Rotation introduction mechanism, 8...2 stage, 9,91
J. 9ψ...Rotation direction conversion mechanism (e.g. bevel gear), 10B
, IOA...Rotary motion - Direct 31f! ! Next to the motion converter (
e.g. spur gear and rack shaft), IOA, IOC... linear motion-rotation direction conversion mechanism (e.g. straight shaft and spur gear), 11
...Rotation introduction mechanism (e.g. spur gear), 12A, 12B.
・Rotation direction conversion mechanism (e.g. worm gear), 13...
・Linear introduction machine, 14... θ-axis rotating structure, 15...
T-axis rotating structure, 21...inner shaft, 22 first port! Kaya 2 (21 Sumire 3 (21 ¥) 4 Fig. 6 Fig. 7 Fig. 2 Z engraving, fl 5 Fig. 94 Key 11

Claims (1)

[Claims] It uses a double shaft consisting of an inner shaft and an outer shaft, which slide on each other in the axial direction but rotate as a unit. Drive in the x direction is performed by linear motion applied from the outside, but drive in the y direction is installed in the x direction. Drive in the z direction is achieved by externally applied shaft rotation using the sliding of a double shaft, and a double shaft is installed in each of the x and y directions. The rotation of θ is performed by a system equipped with double axes installed in the x, y, and z directions and a rotation transmission mechanism, and the rotation of ψ is performed by a system similar to the θ rotation mechanism, and the rotational movement is x, y, z by converting it into linear motion in the θ-axis direction and then returning it to rotational motion.
, θ, and ψ independently in vacuum without interfering with each other.