JPS62177480A - Xy table - Google Patents

Abstract

(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to an XY table for moving and positioning an object to an arbitrary position on a plane.

[Technical background of the invention and its problems]

Machine tools, measuring devices, and automatic assembly (XY tables are widely used in the field to move objects to be processed, measured, or assembled to arbitrary positions on surfaces.

This XY table normally uses a rotary motor as a drive source, and moves the movable tables (X table and Y table) by a feed screw mechanism.

This is the Y table on the X table and this'k, Q
It is heavy because it is equipped with a motor that moves in an X direction.

It was difficult to drive at high speed. Further, the feed screw mechanism requires a highly accurate feed screw and a highly rigid housing to hold it, which also causes an increase in weight. As a countermeasure to these problems, the use of a near motor has been proposed, for example, as seen in Japanese Patent Laid-Open No. 58-18711. In other words, the idea is to directly drive the X and Y tables with two linear motors instead of having to slow down the feed screws, which would result in an increase in weight. Therefore, it is possible to drive at a higher speed than the feed screw Isogori's. However, as recent semiconductor devices (such as bonding devices) have become smaller, lighter, and more reliable, there is also a demand for improved performance of the XY tables used therein. Requirements for this performance improvement include accurate positioning and quick response, and each component has damping characteristics (high vibration damping ability).
It is necessary to improve the specific elastic modulus. However, the above
When paying particular attention to the moving table in the Y table.

There is a problem in that it is difficult to achieve both of the above characteristics with aluminum alloy, which is one of its constituent materials. In other words, when trying to reduce weight for the purpose of quick response, the rigidity is insufficient and resonance vibration i.
1i#'f;! : The generated ji causes a decrease in the supporting force in the processing section. On the other hand, in order to avoid these problems, the shape of the moving platform and its mechanism should be improved.

Increased weight hinders quick response performance.

[Purpose of the invention]

The present invention has the characteristics of both accurate positioning and quick response K? R
The purpose is to provide an XY table that can perform high-speed addition processing.

[Summary of the invention]

The present invention consists of an X-direction moving table that is movable in one direction with respect to a table support base, and a Y-direction moving table that is provided on the X-direction moving table and is movable in a direction orthogonal to the moving direction. At the table.

The main feature of the present invention is that the surface of the movable table is grooved with a composite material of carbon fiber and aramid fiber. Only the upper and lower surfaces of this movable table may be formed of a hybrid composite material, or they may be combined.

The carbon fibers forming the grooves in the hybrid composite material are an indispensable material for imparting high specific elasticity, while the aramid fibers are a necessary material for imparting high damping capacity. Therefore, by arranging aramid fibers in a layered manner in the region of the movable table where the damping ability is most required, near the surface where the bending stress of the arm is maximum.

The high damping ability of aramid fibers can be fully utilized without impairing the high specific elasticity of carbon fibers. Methods for laminating such aramid fibers include 1, for example, the two-direction dipping method in which one fiber direction is aligned with the principal stress direction, and the diagonal lamination method in which the fibers are laminated at an angle of ±0 so that the allowable stress in the principal stress direction is maximized. There are various methods such as a plain weave cyclos method, a satin weave cyclos method that increases the number of fibers in the principal stress direction, and a method in which carbon fibers are laminated in a mixed state.

In this case, it is also possible to change the proportion of the aramid fibers depending on the required specific modulus. This is a hybrid composite material of carbon fiber and aramid fiber.

It is molded using resin. Examples of this resin include epoxy resin, unsaturated polyurethane, f
/l/ resin, vinyl ester polyimide resin, polymethyl ethyl ketone and the like.

〔Effect of the invention〕

As described in detail above, according to the present invention, the moving table is made of a hybrid composite material made of carbon fibers and aramid fibers, and the carbon fibers have excellent high specific elasticity and the aramid fibers have excellent high specific elasticity. XY that satisfies both characteristics of accurate positioning and quick response by adding damping ability and enables high-speed processing
Tables can be provided.

[Embodiments of the invention]

The present invention will be explained in detail below.

First, a flat cross carbon fiber prepreg was used as a core part, and 36 unidirectional carbon fiber prepregs and 36 flat warped cross aramid fibers were alternately laminated on both sides of this core part. Next, this was carried out using the vacuum back method (125°G, 1
．． A hybrid composite laminate with a sandwich structure having a skin of carbon fiber and aramid fiber on both sides was fabricated by molding (curing treatment for 5 hours).

Next, from this laminated board, a thickness of 15 by 9 and a width of 45 is made.

Bending test specimens having 300 lengths were exploded.

Weight and flexural modulus of the obtained test piece.

The bending strength and specific modulus of elasticity were measured and the results are shown in the table below. Note that in Table 2, the characteristics of the aluminum alloy A3052 are also listed as a comparison column.

As is clear from the table above, the moving platform made of the hybrid composite laminate of this example has an extremely large specific modulus of elasticity compared to the aluminum alloy of the comparative row.

In addition, the hybrid composite laminates and aluminum alloys of this Example and Comparative Example were assembled into the XY alloy table shown in FIG. The vibration characteristics were investigated.

1 in FIG. 1 is a planar table support.

An X-direction table 2 that is movable in the X direction is placed on the top surface of this table 2, and a Y-direction moving table 2 and a Y-direction moving table 3 that are movable in the direction perpendicular to this table 2 are placed on the top surface of this table 2, respectively. It is provided on the support stand 1 and connected to the near motor 4.5, and is
It is designed to be driven in the direction.

The socket side 8 of the linear motor 4 is fixed to the X-direction moving table 2, and the socket member 8 of the linear motor 5 is fixed to a bracket 9 movable relative to the direction orthogonal to the Y-direction moving table 3 (X direction). has been done. A pair of guide rollers 10 are attached to the bottom surface of this bracket 9.

These guide rollers 10 are in rolling contact with the table support base 1 so as to sandwich a guide plate 11 which is protruded along the Y direction. Therefore, the Y-direction moving table 3 slides on the bracket 9 when the X-direction moving table 2 moves in the Y direction, and is guided along the guide plate 11 when moving in the Y direction.

Therefore, when a current is applied to the linear motor 4, the X-direction moving table 2 moves in the X direction f on the table support 1, and therefore the Y-direction moving table 3 on this X-direction moving table 2 also moves in the same direction (X direction). Move to. At this time, the Y-direction moving table 3 slides on the bracket 9 fixed to the linear motor 5. In addition, the linear motor 5
When a current is applied to the Y-direction moving table 3, the Y-direction moving table 3 moves in the iY direction on the X-direction moving table 2, so the guide roller 10 rotates with the guide plate 11 and is guided in the Y-direction.

Therefore, by operating the linear motors 4 and 5 simultaneously, the Y-direction moving table 3 can be moved in any direction on a plane.

Therefore, when all the X and Y tables of the present example and comparative example are attached to the XY table shown in FIG. 1 above, when the table is moved two degrees in the (No load is mounted on the table) It is installed in the center of the X table as shown in Figures 3 and 4.

In addition, Fig. 3 is a characteristic diagram showing the vibration curve when the X table and Y table made of a hybrid composite material of carbon fiber and aramid fiber of this example are attached, and Fig. 4 is a characteristic diagram showing the vibration curve when the X table and Y table made of a hybrid composite material of carbon fiber and aramid fiber are attached. It is a characteristic diagram which shows the vibration curve when a table and a Y table are attached.

As is clear from FIGS. 3 and 4, the XY table of this embodiment has an initial amplitude of 0.0024+m and a decay time of 0.
02 seconds, whereas the XY table of the comparative example has an initial amplitude of Q, QQ4m, and a decay time of 0.05 seconds.

Therefore, an XY table incorporating an X table and a Y table with a high specific modulus and high damping capacity as in this example has quick response and accurate positioning performance, and has excellent performance improvement (high speed processing). can be realized.

[Brief explanation of drawings]

FIG. 1 is a schematic diagram showing an XY table in an embodiment of the present invention, in which (a) is a plan view, (fb) is a side view,
Figure 2 shows the speed curve when driving the XY table. Figure 3 of the coffin is a characteristic diagram showing the vibration curve of this example (using a hybrid composite material of carbon delicate and aramid fibers for the X table and Y table), and Figures v and 4 are characteristic diagrams of the comparative example (using At and A for the X table and Y table). FIG. 3 is a characteristic diagram showing the vibration curve of the alloy (using the alloy). 1...Table support base, 2...X direction moving table. 3... Y direction moving table, 4, 5... linear motor. 8... Socket member, 9... Bracket, 10...
- Guide roller, 11... guide plate. Agent Patent Attorney Nori Chika Yudo Kikuretsu Takehana

Claims (1)

[Claims] An XY consisting of an X-direction moving base that is movable in one direction with respect to the table support base, and a Y-direction moving base that is installed on this X-direction movable base and is movable in a direction perpendicular to the moving direction.
An XY table characterized in that the surface of the movable table is made of a hybrid composite material of carbon fiber and aramid fiber.