JPS62177034U - - Google Patents
Info
- Publication number
- JPS62177034U JPS62177034U JP6399486U JP6399486U JPS62177034U JP S62177034 U JPS62177034 U JP S62177034U JP 6399486 U JP6399486 U JP 6399486U JP 6399486 U JP6399486 U JP 6399486U JP S62177034 U JPS62177034 U JP S62177034U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- tray
- recess
- processed
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 12
- 238000005530 etching Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Pile Receivers (AREA)
- Physical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6399486U JPS62177034U (hu) | 1986-04-30 | 1986-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6399486U JPS62177034U (hu) | 1986-04-30 | 1986-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62177034U true JPS62177034U (hu) | 1987-11-10 |
Family
ID=30899742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6399486U Pending JPS62177034U (hu) | 1986-04-30 | 1986-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62177034U (hu) |
-
1986
- 1986-04-30 JP JP6399486U patent/JPS62177034U/ja active Pending