JPS62177034U - - Google Patents
Info
- Publication number
- JPS62177034U JPS62177034U JP6399486U JP6399486U JPS62177034U JP S62177034 U JPS62177034 U JP S62177034U JP 6399486 U JP6399486 U JP 6399486U JP 6399486 U JP6399486 U JP 6399486U JP S62177034 U JPS62177034 U JP S62177034U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- tray
- recess
- processed
- opening
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 12
- 238000005530 etching Methods 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Pile Receivers (AREA)
- Physical Vapour Deposition (AREA)
- Drying Of Semiconductors (AREA)
Description
第１図は本考案に係る基板トレイの一実施例を
示す斜視図、第２図は同トレイの平面図、第３図
は底板の拡大平面図、第４図はエツチング装置の
断面図、第５図は基板トレイの従来例を示す斜視
図である。
８…基板トレイ、９…被処理基板、１０…開口
部、２０…基板取出し用凹部、２１…挿通孔、２
２…底板、２４…基板載置面。
FIG. 1 is a perspective view showing an embodiment of the substrate tray according to the present invention, FIG. 2 is a plan view of the same tray, FIG. 3 is an enlarged plan view of the bottom plate, FIG. 4 is a sectional view of the etching device, and FIG. FIG. 5 is a perspective view showing a conventional example of a substrate tray. 8... Substrate tray, 9... Substrate to be processed, 10... Opening, 20... Recess for taking out the substrate, 21... Insertion hole, 2
2... Bottom plate, 24... Board mounting surface.
Claims (1)
の基板トレイに前記被処理基板を収容する開口部
と、この開口部と連通する基板取外し用凹部とを
設け、この凹部の底面の一部が基板載置面を構成
することを特徴とする基板トレイ。 In a substrate tray that holds a substrate to be processed, the substrate tray is provided with an opening for accommodating the substrate to be processed, and a recess for removing the substrate that communicates with the opening, and a part of the bottom of the recess is provided with a substrate mounting area. A substrate tray comprising a surface.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6399486U JPS62177034U (en) | 1986-04-30 | 1986-04-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6399486U JPS62177034U (en) | 1986-04-30 | 1986-04-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62177034U true JPS62177034U (en) | 1987-11-10 |
Family
ID=30899742
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6399486U Pending JPS62177034U (en) | 1986-04-30 | 1986-04-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62177034U (en) |
-
1986
- 1986-04-30 JP JP6399486U patent/JPS62177034U/ja active Pending
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