JPS62177031U - - Google Patents

Info

Publication number
JPS62177031U
JPS62177031U JP4400486U JP4400486U JPS62177031U JP S62177031 U JPS62177031 U JP S62177031U JP 4400486 U JP4400486 U JP 4400486U JP 4400486 U JP4400486 U JP 4400486U JP S62177031 U JPS62177031 U JP S62177031U
Authority
JP
Japan
Prior art keywords
support
heat treatment
treatment apparatus
wafer
point
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4400486U
Other languages
English (en)
Japanese (ja)
Other versions
JPH075629Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986044004U priority Critical patent/JPH075629Y2/ja
Publication of JPS62177031U publication Critical patent/JPS62177031U/ja
Application granted granted Critical
Publication of JPH075629Y2 publication Critical patent/JPH075629Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

JP1986044004U 1986-01-22 1986-03-27 半導体ウエ−ハ熱処理装置 Expired - Lifetime JPH075629Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986044004U JPH075629Y2 (ja) 1986-01-22 1986-03-27 半導体ウエ−ハ熱処理装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP61-6620 1986-01-22
JP662086 1986-01-22
JP1986044004U JPH075629Y2 (ja) 1986-01-22 1986-03-27 半導体ウエ−ハ熱処理装置

Publications (2)

Publication Number Publication Date
JPS62177031U true JPS62177031U (US20030204162A1-20031030-M00001.png) 1987-11-10
JPH075629Y2 JPH075629Y2 (ja) 1995-02-08

Family

ID=33031522

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986044004U Expired - Lifetime JPH075629Y2 (ja) 1986-01-22 1986-03-27 半導体ウエ−ハ熱処理装置

Country Status (1)

Country Link
JP (1) JPH075629Y2 (US20030204162A1-20031030-M00001.png)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS589579A (ja) * 1981-07-06 1983-01-19 Mitsubishi Electric Corp 電力可逆変換制御回路

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS589579A (ja) * 1981-07-06 1983-01-19 Mitsubishi Electric Corp 電力可逆変換制御回路

Also Published As

Publication number Publication date
JPH075629Y2 (ja) 1995-02-08

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