JPS6217702A - 回折格子の製造方法 - Google Patents

回折格子の製造方法

Info

Publication number
JPS6217702A
JPS6217702A JP15523685A JP15523685A JPS6217702A JP S6217702 A JPS6217702 A JP S6217702A JP 15523685 A JP15523685 A JP 15523685A JP 15523685 A JP15523685 A JP 15523685A JP S6217702 A JPS6217702 A JP S6217702A
Authority
JP
Japan
Prior art keywords
film
diffraction grating
region
photoresist
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15523685A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0323884B2 (enrdf_load_stackoverflow
Inventor
Katsuyuki Uko
宇高　勝之
Shigeyuki Akiba
重幸 秋葉
Yuichi Matsushima
松島　裕一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
KDDI Corp
Original Assignee
Kokusai Denshin Denwa KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kokusai Denshin Denwa KK filed Critical Kokusai Denshin Denwa KK
Priority to JP15523685A priority Critical patent/JPS6217702A/ja
Priority to US06/882,588 priority patent/US4826291A/en
Priority to GB8617156A priority patent/GB2178192B/en
Publication of JPS6217702A publication Critical patent/JPS6217702A/ja
Publication of JPH0323884B2 publication Critical patent/JPH0323884B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP15523685A 1985-07-16 1985-07-16 回折格子の製造方法 Granted JPS6217702A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP15523685A JPS6217702A (ja) 1985-07-16 1985-07-16 回折格子の製造方法
US06/882,588 US4826291A (en) 1985-07-16 1986-07-07 Method for manufacturing diffraction grating
GB8617156A GB2178192B (en) 1985-07-16 1986-07-15 Method for manufacturing diffraction grating

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15523685A JPS6217702A (ja) 1985-07-16 1985-07-16 回折格子の製造方法

Publications (2)

Publication Number Publication Date
JPS6217702A true JPS6217702A (ja) 1987-01-26
JPH0323884B2 JPH0323884B2 (enrdf_load_stackoverflow) 1991-03-29

Family

ID=15601510

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15523685A Granted JPS6217702A (ja) 1985-07-16 1985-07-16 回折格子の製造方法

Country Status (1)

Country Link
JP (1) JPS6217702A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS642008A (en) * 1987-06-24 1989-01-06 Mitsubishi Electric Corp Formation of diffraction grating
US4842633A (en) * 1987-08-25 1989-06-27 Matsushita Electric Industrial Co., Ltd. Method of manufacturing molds for molding optical glass elements and diffraction gratings

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS642008A (en) * 1987-06-24 1989-01-06 Mitsubishi Electric Corp Formation of diffraction grating
US4842633A (en) * 1987-08-25 1989-06-27 Matsushita Electric Industrial Co., Ltd. Method of manufacturing molds for molding optical glass elements and diffraction gratings

Also Published As

Publication number Publication date
JPH0323884B2 (enrdf_load_stackoverflow) 1991-03-29

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