JPS62176533A - Production of vacuum container - Google Patents
Production of vacuum containerInfo
- Publication number
- JPS62176533A JPS62176533A JP1645986A JP1645986A JPS62176533A JP S62176533 A JPS62176533 A JP S62176533A JP 1645986 A JP1645986 A JP 1645986A JP 1645986 A JP1645986 A JP 1645986A JP S62176533 A JPS62176533 A JP S62176533A
- Authority
- JP
- Japan
- Prior art keywords
- vacuum container
- ceramics
- protective layer
- vacuum
- container
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 239000000919 ceramic Substances 0.000 claims abstract description 28
- 239000011241 protective layer Substances 0.000 claims abstract description 20
- 239000002826 coolant Substances 0.000 claims abstract description 13
- 238000007750 plasma spraying Methods 0.000 claims abstract description 10
- 238000010030 laminating Methods 0.000 claims abstract description 5
- 238000000034 method Methods 0.000 claims description 14
- 239000010410 layer Substances 0.000 claims description 12
- 239000007769 metal material Substances 0.000 claims description 7
- 238000009833 condensation Methods 0.000 claims description 5
- 230000005494 condensation Effects 0.000 claims description 5
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 239000011248 coating agent Substances 0.000 abstract description 7
- 238000000576 coating method Methods 0.000 abstract description 7
- 239000000498 cooling water Substances 0.000 abstract description 6
- 230000002093 peripheral effect Effects 0.000 abstract description 6
- 239000000843 powder Substances 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 10
- 238000005524 ceramic coating Methods 0.000 description 6
- 239000008399 tap water Substances 0.000 description 6
- 235000020679 tap water Nutrition 0.000 description 6
- 238000001816 cooling Methods 0.000 description 4
- 238000010521 absorption reaction Methods 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 3
- 238000005336 cracking Methods 0.000 description 3
- 150000002500 ions Chemical class 0.000 description 3
- 229910052770 Uranium Inorganic materials 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- JFALSRSLKYAFGM-UHFFFAOYSA-N uranium(0) Chemical compound [U] JFALSRSLKYAFGM-UHFFFAOYSA-N 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- UFGZSIPAQKLCGR-UHFFFAOYSA-N chromium carbide Chemical compound [Cr]#C[Cr]C#[Cr] UFGZSIPAQKLCGR-UHFFFAOYSA-N 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 230000003014 reinforcing effect Effects 0.000 description 1
- 238000007751 thermal spraying Methods 0.000 description 1
- 229910003470 tongbaite Inorganic materials 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J3/00—Processes of utilising sub-atmospheric or super-atmospheric pressure to effect chemical or physical change of matter; Apparatus therefor
- B01J3/006—Processes utilising sub-atmospheric pressure; Apparatus therefor
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は、例えば粒子加速器等に用いられる真空容器の
ｆＪ造方法に係り、特に非磁性金属材料で超薄肉に作っ
た真空容器の外面に、プラズマ溶射によりセラミックス
を積層コーティングして保護層を形成する真空容器の製
造方法に関する。[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to a fJ manufacturing method for a vacuum container used, for example, in a particle accelerator, and in particular, the invention relates to an fJ manufacturing method for a vacuum container used for example in a particle accelerator. , relates to a method for manufacturing a vacuum container in which a protective layer is formed by laminated coating of ceramics by plasma spraying.
現在、ウランを光の速さ近くまで加速してウランに衝突
させ、諸現象を解明するようにした高エネルギ重イオン
装置の開発が進められている。Currently, a high-energy heavy ion device is being developed that accelerates uranium to near the speed of light and collides with it to elucidate various phenomena.
ところで重イオン装置は、ウランのような単イオンを真
空中で強い電界によって高いエネルギに加速するもので
あることから、超高真空容器が必要となる。しかも、こ
の真空容器の周囲には、強電界を作るための電磁石が配
置されるため、真空容器を非磁性でしかも超薄肉（例え
ば０．１ｍｍ）の金属材料で作って渦電流損を楊小にす
る必要がある。しかし、超薄肉材料で作った真空容器で
は、外圧によるバックリングを防ぐ必要がある。By the way, since heavy ion devices accelerate single ions such as uranium to high energy in a vacuum using a strong electric field, an ultra-high vacuum container is required. Moreover, since electromagnets are placed around the vacuum container to create a strong electric field, the vacuum container is made of a non-magnetic and ultra-thin (for example 0.1 mm) metal material to reduce eddy current loss. need to be small. However, in vacuum containers made of ultra-thin materials, it is necessary to prevent buckling due to external pressure.
そこで、従来から、第４図に示すように非磁性金属材料
で０．１１１１１１４’？！度の超薄肉に形成された真
空容器１の両端にフランジ２を溶接部３を介してそれぞ
れ固着するとともに、前記真空容器１の外周面に、プラ
ズマ溶射によりセラミックスを積層コーティングして保
護層４を形成し、この保！１ｌ１４により真空容器１を
機械的に補強する方策が提案されている。Therefore, conventionally, as shown in FIG. 4, a non-magnetic metal material of 0.1111114'? ! Flanges 2 are fixed to both ends of the vacuum container 1, which is formed to have an ultra-thin wall, via welds 3, and the outer peripheral surface of the vacuum container 1 is laminated and coated with ceramics by plasma spraying to form a protective layer 4. Form this and keep it! 1l14 has been proposed to mechanically reinforce the vacuum vessel 1.
この場合、溶射セラミックスの剛性は、金属材料の剛性
に比較しで低いため、保護層４の厚さは数ｍｍ以上にす
る必要があるが、セラミックスは非磁性で絶縁体である
ため、渦電流損の問題は生じない。In this case, since the rigidity of sprayed ceramics is low compared to that of metal materials, the thickness of the protective layer 4 must be several mm or more, but since ceramics are non-magnetic and insulating, eddy current There is no question of loss.
ところで、従来プラズマ溶射によるセラミックスコーテ
ィングは、第５図に示すようにプラズマガン５から噴射
されるプラズマジェット６中にセラミックスの粉末を供
給し、このセラミックスをプラズマジェット６で溶融し
つつ加速して被溶射素材７に衝突させることにより行な
われ、被溶射素材７に衝突したセラミックスは、被溶射
素材７の表面に濡れ拡がりながら熱を奪われ固化して溶
射被膜８を形成するものである。By the way, in conventional ceramic coating by plasma spraying, as shown in FIG. 5, ceramic powder is supplied into a plasma jet 6 sprayed from a plasma gun 5, and the ceramic is melted and accelerated by the plasma jet 6 to be coated. This is done by colliding with the material 7 to be thermally sprayed, and the ceramic that has collided with the material 7 to be thermally sprayed wets and spreads on the surface of the material 7 to be thermally sprayed, absorbs heat, and solidifies to form a thermally sprayed coating 8 .
そして一般には、セラミックスの溶射被膜８の厚さに比
較して被溶射素材７の寸法が大きく、かなりの熱吸収能
を有することに加え、プラズマガン５のトラバース速度
や被溶射素材７の回転速度等を高めることにより、被溶
射素材７の温度上昇を低く、例えば１５０℃以下に抑え
ることができる。このため、熱による被溶射素材７の歪
変化や機械強度の変化はほとんどなく、また圧縮空気の
エアジェツト９による冷却を行なえば、被溶射素材７の
温度上昇をさらに低くすることも可能となる。In general, the size of the sprayed material 7 is larger than the thickness of the ceramic sprayed coating 8 and has considerable heat absorption ability, as well as the traverse speed of the plasma gun 5 and the rotational speed of the sprayed material 7. By increasing the temperature, the temperature rise of the material 7 to be thermally sprayed can be suppressed to a low level, for example, 150° C. or less. Therefore, there is almost no change in distortion or change in mechanical strength of the material 7 to be thermally sprayed due to heat, and by cooling with the air jet 9 of compressed air, it is possible to further reduce the temperature rise in the material 7 to be thermally sprayed.
ところが、前述のように超薄肉の金属材料で作った真空
容器１の外面に、プラズマ溶射によりセラミックスを積
層コーティングして厚さ数ミリ以上の保護層３を形成し
ようとすると、前記従来のプラズマ溶射方法では、種々
の問題が生じる。However, when trying to form a protective layer 3 with a thickness of several millimeters or more on the outer surface of the vacuum vessel 1 made of an ultra-thin metal material by plasma spraying, as described above, the conventional plasma Various problems arise with thermal spraying methods.
すなわち、真空容器１は超薄肉であるため熱吸収能が極
めて小さく、したがってプラズマガン５のトラバース速
度や真空容器１の回転速度等を調整しただけでは真空容
器１の温度上昇を抑えることができず、歪変化や機械強
度の変化が避けられないという問題がある。In other words, since the vacuum vessel 1 has an ultra-thin wall, its heat absorption capacity is extremely small. Therefore, it is not possible to suppress the temperature rise of the vacuum vessel 1 by simply adjusting the traverse speed of the plasma gun 5, the rotation speed of the vacuum vessel 1, etc. First, there is the problem that changes in strain and mechanical strength are unavoidable.
また、真空容器１は超薄肉で変型し易いため、圧縮空気
によるエアジェツト９を使用できず、またセラミックス
の積層過程での蓄積熱により、真空容器１とセラミック
スとの界面が剥離したり割れが発生するという問題もあ
る。In addition, since the vacuum container 1 is ultra-thin and easily deformed, the air jet 9 using compressed air cannot be used, and the interface between the vacuum container 1 and the ceramics may peel or crack due to accumulated heat during the ceramic lamination process. There are also problems that occur.
本発明はかかる現況に鑑みなされたもので、渦電流損を
極力小さくして機械的な強度を得るようにするために、
非磁性金属材料で超薄肉に作った真空容器の外面に、プ
ラズマ溶射によりセラミックスを積層コーティングして
保護層を形成する際に、真空容器の温度上昇による歪変
化および機械強度の変化を有効に防止でき、また真空容
器とセラミックスとの界面の剥離および割れの発生を防
止できる真空容器の製造方法を提供することを目的とす
る。The present invention was made in view of the current situation, and in order to minimize eddy current loss and obtain mechanical strength,
When forming a protective layer by coating the outer surface of an ultra-thin vacuum container made of non-magnetic metal material with ceramics using plasma spraying, we effectively prevent changes in strain and mechanical strength due to temperature rises in the vacuum container. It is an object of the present invention to provide a method for manufacturing a vacuum container that can prevent peeling and cracking at the interface between the vacuum container and ceramics.
本発明は、前記保護層形成時に、真空容器内に冷却媒体
を供給して冷却するようにし、もって、真空容器が超薄
肉であってもその温度上昇を有効に防止できるようにし
たことを特徴とする。The present invention provides that, when forming the protective layer, a cooling medium is supplied into the vacuum container for cooling, thereby effectively preventing a rise in temperature of the vacuum container even if the vacuum container has an ultra-thin wall. Features.
以下、本発明の第１実施例を第１図を参照して説明する
。A first embodiment of the present invention will be described below with reference to FIG.
第１図において符号１は、例えば５ｔＪＳ３０４ステン
レス鋼のような非磁性金属材料で０．１１１１ｍ程度の
超薄肉の円筒状に形成された真空容器であり、この真空
容器１の両端部には、溶接部３を介して７ランジ２がそ
れぞれ固着されている。In FIG. 1, reference numeral 1 denotes a vacuum container formed into an ultra-thin cylindrical shape of about 0.1111 m using a non-magnetic metal material such as 5t JS304 stainless steel. Seven flanges 2 are fixed to each other through welded portions 3.
これら各フランジ２の外面側には、第１図に示すように
口出し１２を有する盲フランジ１１が配置されており、
両７ランジ２．１１は、その間にシール部材１３を介装
した状態で図示しないボルトにより接合されている。そ
して前記真空容器１内には、−万端の寵フランジ１１の
口出し１２ｈ１ら水道水等の冷却水が供給され、真空容
器１内に充満して真空容器１を内面側から冷却した冷却
水は、他方端の盲フランジ１１の口出し１２から排出さ
れるようになっている。A blind flange 11 having an opening 12 is arranged on the outer surface side of each of these flanges 2, as shown in FIG.
Both 7 langes 2.11 are joined by bolts (not shown) with a seal member 13 interposed therebetween. Cooling water such as tap water is supplied into the vacuum container 1 from the outlet 12h1 of the flange 11, and the cooling water that fills the vacuum container 1 and cools the vacuum container 1 from the inner side is as follows. It is designed to be discharged from the opening 12 of the blind flange 11 at the other end.
一方前記真空容器１の外部には、第１図に示すようにプ
ラズマジェット６を噴射するプラズマガン５が配置され
ており、真空容器１の外周面には、このプラズマガン５
を用いたプラズマ溶射によりセラミックスが積層コーテ
ィングされて保１ｉ１１ｉ４が形成されるようになって
いる。On the other hand, a plasma gun 5 for ejecting a plasma jet 6 is arranged outside the vacuum container 1, as shown in FIG.
Ceramics are laminated and coated by plasma spraying using 1i11i4.
次に、本実施例における真空容器１の製造方法について
説明する。Next, a method for manufacturing the vacuum container 1 in this example will be explained.
製造に際しては、まず真空容器１両端の７ランジ２の外
面側に寵フランジ１１をそれぞれ接合し、一方の盲７ラ
ンジ１１の口出し１２から真空容器１内に水道水を冷却
水として供給する。真空容器１内に供給された冷却水は
、真空容器１内に充満されて真空容器１を内側から冷却
した後、他方の盲フランジ１１の口出し１２から外部に
排出される。In manufacturing, first, the control flanges 11 are joined to the outer surfaces of the seven flange 2 at both ends of the vacuum vessel 1, and tap water is supplied as cooling water into the vacuum vessel 1 from the opening 12 of one blind seven flange 11. The cooling water supplied into the vacuum container 1 fills the vacuum container 1 and cools the vacuum container 1 from the inside, and then is discharged to the outside from the outlet 12 of the other blind flange 11.
この状態で、プラズマガン５からプラズマジェット６を
噴射させ、このプラズマジェット６にセラミックスの粉
末を供給する。すると、セラミックスはプラズマジェッ
ト６により溶融しつつ加速され、飛行して真空容器１の
外周面に衝突し、真空容器１の外面にそって濡れ拡がり
ながら熱を奪われ固化してセラミックスコーティングが
なされる。そして、このコーティングを積層することに
より保護層４が形成される。In this state, a plasma jet 6 is ejected from the plasma gun 5, and ceramic powder is supplied to the plasma jet 6. Then, the ceramic is melted and accelerated by the plasma jet 6, flies and collides with the outer peripheral surface of the vacuum container 1, and spreads along the outer surface of the vacuum container 1, absorbing heat and solidifying to form a ceramic coating. . Then, the protective layer 4 is formed by laminating this coating.
第２図は、本実施例においてセラミックスを積層する過
程での真空容器１の温度変化を、従来方法の場合と比較
して示したものである。FIG. 2 shows the temperature change of the vacuum vessel 1 during the process of laminating ceramics in this example, in comparison with that in the conventional method.
前述のように従来方法では、真空容器１が超薄肉で熱吸
収能が極めて小さく、真空容器１内側からの大気放熱量
も小さいため、セラミックスの積層過程での蓄積熱によ
り真空容器１の温度は急増する。そしてほとんどの場合
、セラミックスが１−一積層される以前に、セラミック
スと真空容器１との界面に剥離や割れが発生する。この
時の真空容器１の温度は、３００℃以上にも達しており
、例えば真空容器１を５ＵＳ３０４ステンレス鋼で形成
した場合には、粒界にクロム炭化物が析出して微視組織
が変化してしまっている。As mentioned above, in the conventional method, the vacuum vessel 1 has an ultra-thin wall and has extremely low heat absorption capacity, and the amount of heat radiated from the inside of the vacuum vessel 1 to the atmosphere is small. increases rapidly. In most cases, peeling or cracking occurs at the interface between the ceramics and the vacuum container 1 before the ceramics are laminated one-on-one. The temperature of the vacuum vessel 1 at this time reaches 300°C or higher, and for example, if the vacuum vessel 1 is made of 5US304 stainless steel, chromium carbide will precipitate at the grain boundaries and the microstructure will change. It's stored away.
これに対して本実施例に係る方法では、真空容器１内に
大気温度とほぼ同一の水道水が通水、充満され、真空容
器１の内側が水道水との熱伝達によって大気温度近くに
冷却されている。真空容器１は超薄肉であるので、真空
容器１の外側も熱伝達によって内側とほぼ同等に冷却さ
れている。On the other hand, in the method according to the present embodiment, the vacuum container 1 is filled with tap water that is almost at the same temperature as the atmospheric temperature, and the inside of the vacuum container 1 is cooled to near the atmospheric temperature by heat transfer with the tap water. has been done. Since the vacuum container 1 has an ultra-thin wall, the outside of the vacuum container 1 is cooled almost as much as the inside by heat transfer.
しかして、真空容器１の構造的特徴を利用して真空容器
１の内側を水道水で冷却することにより、真空容器１の
温度を大気温度とほぼ同一にだもつことができ、真空容
器１の熱による歪変化や機械強度の変化の発生を有効に
防止できる。このため、真空容器１とセラミックスとの
界面の割れや剥離がない状態で、真空容器の外周面に数
ミリ以上のセラミックスの積層による保護層４を形成す
ることが可能となる。By utilizing the structural features of the vacuum vessel 1 to cool the inside of the vacuum vessel 1 with tap water, the temperature of the vacuum vessel 1 can be kept almost the same as the atmospheric temperature. It is possible to effectively prevent distortion changes and mechanical strength changes due to heat. Therefore, it is possible to form the protective layer 4 by laminating ceramics of several millimeters or more on the outer peripheral surface of the vacuum container without cracking or peeling at the interface between the vacuum container 1 and the ceramics.
第３図は本発明の第２実施例を示すもので、盲フランジ
１１に、真空容器１内に突出する中子１４を設けるよう
にしたものであり、他の構成および真空容器１の製造方
法は、前記第１実施例と同一である。FIG. 3 shows a second embodiment of the present invention, in which the blind flange 11 is provided with a core 14 that protrudes into the vacuum container 1. Other configurations and methods of manufacturing the vacuum container 1 are also available. is the same as in the first embodiment.
しかして、盲７ランジ１１に中子１４を設けることによ
り、真空容器１の容積がその分小さくなり、前記第１実
施例に比較して少ない冷却水伍で同等の真空容器１に対
する冷却効果が得られる。By providing the core 14 on the blind 7 flange 11, the volume of the vacuum vessel 1 is reduced by that amount, and the cooling effect for the same vacuum vessel 1 can be achieved with a smaller amount of cooling water than in the first embodiment. can get.
なお、前記両実施例では、冷却媒体として水道水を用い
る場合について説明したが、他の公知の液体や気体を用
いるようにしてもよい。In both of the above embodiments, tap water is used as the cooling medium, but other known liquids or gases may be used.
また前記両実施例では特に説明しなかったが、保護層４
の少なくとも初層形成時に、冷却媒体の温度を結露温度
以上にしたり冷却媒体の圧力を大気以上にすることによ
り、より好ましい結果が得られる。Although not particularly explained in the above embodiments, the protective layer 4
More preferable results can be obtained by setting the temperature of the cooling medium to be at least the dew condensation temperature or the pressure of the cooling medium to be at least atmospheric during at least the initial layer formation.
すなわち、保護層４の初層形成時に冷却媒体の温度が結
露点以下である場合には、真空容器１の外周面に結露水
が付着し、そのままセラミックスのプラズマ溶射を行な
うと、結露水の瞬間的な気化によって均一なセラミック
スコーティングが妨げられてしまうおそれがある。この
ため、保ａｇＩ４の初層形成時には、冷却媒体の温度を
結露温度以上にすることが好ましい。なお、第２層以降
の場合には、蓄積熱によって被溶射材表面温度が真空容
器１の温度よりもやや高めになるため、必ずしも結露温
度以上とする必要はない。That is, if the temperature of the cooling medium is below the condensation point when forming the first layer of the protective layer 4, condensed water will adhere to the outer peripheral surface of the vacuum vessel 1, and if plasma spraying of ceramics is performed as it is, the condensed water will instantly disappear. evaporation may prevent a uniform ceramic coating. For this reason, it is preferable that the temperature of the cooling medium be higher than the dew condensation temperature when forming the initial layer of retention agI4. Note that in the case of the second layer and subsequent layers, the surface temperature of the material to be thermally sprayed becomes slightly higher than the temperature of the vacuum vessel 1 due to accumulated heat, so it is not necessarily necessary to set the temperature above the dew condensation temperature.
また、保ｍ層４の初層形成時に冷却媒体の圧力が大気圧
以下である場合には、プラズマジェット６の圧力により
超薄肉の真空容器１が変形してしまうおそれがある。こ
のため、保護層４の初層形成時には、冷却媒体の圧力を
大気圧以上として真空容器１の変形を抑制することが好
ましい。なお第２層以降の場合には、真空容器１に対す
るセラミックスコーティングによる機械的な補強効果が
期待されるので必ずしも大気圧以上とする必要はない。Further, if the pressure of the cooling medium is lower than atmospheric pressure when forming the initial layer of the insulation layer 4, the ultra-thin vacuum container 1 may be deformed by the pressure of the plasma jet 6. For this reason, when forming the first layer of the protective layer 4, it is preferable to suppress the deformation of the vacuum container 1 by controlling the pressure of the cooling medium to be equal to or higher than atmospheric pressure. In addition, in the case of the second layer and subsequent layers, it is not necessary to set the pressure above atmospheric pressure because a mechanical reinforcing effect is expected by the ceramic coating on the vacuum container 1.
以上説明したように本発明は、保護層形成時に、真空容
器内に冷却媒体を供給して冷却するようにしているので
、真空容器が超薄肉であってもその温度上昇を有効に防
止できる。このため、真空容器とセラミックスとの界面
に割れや剥離を生じさせることなく真空容器の外面に数
ミリ以上のセラミックスの積層による保護層を形成する
ことができ、また真空容器の熱による歪変化や機械強度
の変化の発生を防止することができる。As explained above, in the present invention, a cooling medium is supplied into the vacuum container for cooling when forming the protective layer, so even if the vacuum container has an ultra-thin wall, temperature rise can be effectively prevented. . Therefore, a protective layer of several millimeters or more of laminated ceramics can be formed on the outer surface of the vacuum container without causing cracks or peeling at the interface between the vacuum container and the ceramics, and it also prevents strain changes due to heat in the vacuum container. It is possible to prevent changes in mechanical strength from occurring.
４、図面の１２ｆｌ １１な説明
第１図は本発明の第１実施例を示す説明図、第２図は前
記第１実施例の方法および従来方法におけるセラミック
スコーティング時の真空容器温度変化を示すグラフ、第
３図は本発明の第２実施例を示す説明図、第４図は真空
容器の断面図、第５図は従来のプラズマ溶射によるセラ
ミックスコーティング方法を示す説明図である。4. Drawings 12fl 11. Explanation FIG. 1 is an explanatory diagram showing the first embodiment of the present invention, and FIG. 2 is a graph showing temperature changes in the vacuum vessel during ceramic coating in the method of the first embodiment and the conventional method. , FIG. 3 is an explanatory view showing a second embodiment of the present invention, FIG. 4 is a cross-sectional view of a vacuum container, and FIG. 5 is an explanatory view showing a conventional ceramic coating method by plasma spraying.
１・・・真空容器、４・・・保護層、５・・・プラズマ
ガン、６・・・プラズマジェット、１１・・・盲７ラン
ジ、１２・・・口出し、１４・・・中子。DESCRIPTION OF SYMBOLS 1... Vacuum container, 4... Protective layer, 5... Plasma gun, 6... Plasma jet, 11... Blind 7 lunge, 12... Opening, 14... Core.
出願人代理人 佐 藤 −雄 第５図 弗２図Applicant's representative: Mr. Sato Figure 5 Figure 2
Claims (1)
、プラズマ溶射によりセラミックスを積層コーティング
して保護層を形成する真空容器の製造方法において、前
記保護層形成時に、真空容器内に冷却媒体を供給して冷
却することを特徴とする真空容器の製造方法。 ２、保護層の少なくとも初層形成時の冷却媒体温度は、
結露点以上であることを特徴とする特許請求の範囲第１
項記載の真空容器の製造方法。 ３、保護層の少なくとも初層形成時の冷却媒体圧力は、
大気圧以上であることを特徴とする特許請求の範囲第１
項または第２項記載の真空容器の製造方法。[Claims] 1. A method for manufacturing a vacuum container in which a protective layer is formed by laminating ceramics by plasma spraying on the outer surface of a vacuum container made of an ultra-thin non-magnetic metal material, wherein the protective layer is formed. A method for manufacturing a vacuum container, characterized in that the vacuum container is sometimes cooled by supplying a cooling medium into the vacuum container. 2. The temperature of the cooling medium at least during the initial layer formation of the protective layer is:
Claim 1 characterized in that the temperature is above the dew condensation point.
2. Method for manufacturing a vacuum container as described in Section 1. 3. The cooling medium pressure at least during the initial layer formation of the protective layer is:
Claim 1 characterized in that the pressure is at least atmospheric pressure.
The method for manufacturing a vacuum container according to item 1 or 2.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1645986A JPS62176533A (en) | 1986-01-28 | 1986-01-28 | Production of vacuum container |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1645986A JPS62176533A (en) | 1986-01-28 | 1986-01-28 | Production of vacuum container |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62176533A true JPS62176533A (en) | 1987-08-03 |
Family
ID=11916830
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1645986A Pending JPS62176533A (en) | 1986-01-28 | 1986-01-28 | Production of vacuum container |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62176533A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006121511A1 (en) * | 2005-05-10 | 2006-11-16 | Honeywell International Inc. | Method of repair of thin-wall housings |
-
1986
- 1986-01-28 JP JP1645986A patent/JPS62176533A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006121511A1 (en) * | 2005-05-10 | 2006-11-16 | Honeywell International Inc. | Method of repair of thin-wall housings |
| US7367488B2 (en) | 2005-05-10 | 2008-05-06 | Honeywell International, Inc. | Method of repair of thin wall housings |
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