JPS62176488U - - Google Patents
Info
- Publication number
- JPS62176488U JPS62176488U JP19839985U JP19839985U JPS62176488U JP S62176488 U JPS62176488 U JP S62176488U JP 19839985 U JP19839985 U JP 19839985U JP 19839985 U JP19839985 U JP 19839985U JP S62176488 U JPS62176488 U JP S62176488U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- exhaust valve
- vacuum pump
- exhaust
- exhaust pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19839985U JPH0229260Y2 (ar) | 1985-12-25 | 1985-12-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19839985U JPH0229260Y2 (ar) | 1985-12-25 | 1985-12-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62176488U true JPS62176488U (ar) | 1987-11-09 |
| JPH0229260Y2 JPH0229260Y2 (ar) | 1990-08-06 |
Family
ID=31159050
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19839985U Expired JPH0229260Y2 (ar) | 1985-12-25 | 1985-12-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0229260Y2 (ar) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009030595A (ja) * | 2007-06-26 | 2009-02-12 | Mitsutoyo Corp | 真空排気装置および真空排気方法 |
-
1985
- 1985-12-25 JP JP19839985U patent/JPH0229260Y2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009030595A (ja) * | 2007-06-26 | 2009-02-12 | Mitsutoyo Corp | 真空排気装置および真空排気方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0229260Y2 (ar) | 1990-08-06 |