JPS62176281A - Image input device - Google Patents
Image input deviceInfo
- Publication number
- JPS62176281A JPS62176281A JP1588886A JP1588886A JPS62176281A JP S62176281 A JPS62176281 A JP S62176281A JP 1588886 A JP1588886 A JP 1588886A JP 1588886 A JP1588886 A JP 1588886A JP S62176281 A JPS62176281 A JP S62176281A
- Authority
- JP
- Japan
- Prior art keywords
- image
- imaging
- area
- image input
- picking
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 230000003287 optical effect Effects 0.000 claims abstract description 20
- 238000003384 imaging method Methods 0.000 claims description 63
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 238000007689 inspection Methods 0.000 abstract description 6
- 229910052736 halogen Inorganic materials 0.000 abstract description 2
- 150000002367 halogens Chemical class 0.000 abstract description 2
- 241000907506 Israel turkey meningoencephalomyelitis virus Species 0.000 description 19
- 238000000034 method Methods 0.000 description 6
- 230000007423 decrease Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000000428 dust Substances 0.000 description 1
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明は例えば被検査物を照射し、その被検査物の表面
からの光信号を用いて検査する物体表面検査装置の被検
査物表面を撮像するための画像入力装置に関する。[Detailed Description of the Invention] [Technical Field of the Invention] The present invention relates to an object surface inspection device that illuminates an object to be inspected and images the surface of the object to be inspected using an optical signal from the surface of the object. The present invention relates to an image input device for image input.
物体表面検査装置において、たとえば被検査物の表面全
体に光を照射して撮像し、表面状態すなわち塵埃、傷等
の有無を検査するとき、複数箇所に亘る撮像領域が小さ
い場合には多くの画像を撮影する必要がある。この場合
、カメラ用レンズをそれぞれ備えた2台の工業用テレビ
カメラ(以下、ITVカメラという)を用いることによ
って2つの形状、面積の等しい撮像領域の画像が同時に
得られ、撮像回数をほぼ半減することができる。In an object surface inspection device, for example, when the entire surface of an object to be inspected is irradiated with light and imaged to inspect the surface condition, that is, the presence or absence of dust, scratches, etc., many images may be taken if the imaging area covering multiple locations is small. need to be photographed. In this case, by using two industrial television cameras (hereinafter referred to as ITV cameras) each equipped with a camera lens, images of two imaging areas with the same shape and area can be obtained simultaneously, reducing the number of imaging times by almost half. be able to.
そこで、画像の入力方法としては従来、第2図に示すよ
うにカメラ用レンズ(2A) 、 (2B)を備えたI
TVカメラ(IA) 、 (IB)を並設する方法があ
る。Therefore, as a method of inputting images, conventionally, as shown in Fig. 2, an I
There is a method of installing TV cameras (IA) and (IB) in parallel.
しかし、この方法ではITVカメラ(IA) 、 (i
n)およびカメラ用レンズ(2A) 、 (2B)の外
径寸法により制約を受けるため、第2図に示すように撮
像領域(3)、(4)の間隔が広くなり、近接した撮像
領域を撮像することは不可能であり、また被検査物(八
)表面の撮像領域(3)、(4)が第3図に示すように
小さい場合、撮像領域(3)からの光信号(S工)はI
TVカメラ(IA)に入光して画像が得られるのに対し
、撮像領域(4)からの光信号(S2)はITVカメラ
(IB)に入光せず、画像の入力が不可能になるという
不具合がある。また、第4図に示すようにITVカメラ
(IA)およびITVカメラ(IUを直交して配置する
とともに両者間にハーフミラ−(5)を設けることによ
り、隣接する撮像領域(3)、(4)から画像を得る方
法がある。しかし、この方法ではハーフミラ−(5)に
より上記撮像領域(3) 、 (4)からの光信号(S
l)、(32)がITVカメラ(1^)への透過光(し
りと、ITVカメラ(IB)への反射光(L2)と、ハ
ーフミラ−(5)に吸収される吸収光(図示しない)と
に分散され光量が減小するという不具合がある。さらに
、第5図に示すような■字形反射fi (6) C分割
手段)を用いて隣接する撮像領域(3)、(4)からの
光イ言号(Sl)、(32)をITVカメラ(IA)お
よびITVカメラ(IB)に入力し画像を得る方法があ
る。しかし、この方法では撮像領域(3)、(4)より
もカメラ用レンズ(2A) 、 (2B)が小さいとき
、ITVカメラ(IA)およびITVカメラ(IB)へ
の光量が減少し満足すべき画像が得られず、またカメラ
用レンズ(2A) 、 (2B)が大きいときは第6図
に示すように撮像領域(3) 、 (4)との隣接部(
7)の光量が減少するため、画像に光量むらを生ずると
いう欠点がある。However, in this method, ITV camera (IA), (i
n) and the outer diameter dimensions of the camera lenses (2A) and (2B), the distance between the imaging areas (3) and (4) becomes wider as shown in Figure 2, making it difficult to If the imaging areas (3) and (4) on the surface of the object to be inspected (8) are small as shown in Figure 3, the optical signal from the imaging area (3) (S ) is I
While light enters the TV camera (IA) and an image is obtained, the optical signal (S2) from the imaging area (4) does not enter the ITV camera (IB), making it impossible to input an image. There is a problem. In addition, as shown in Fig. 4, by arranging the ITV camera (IA) and the ITV camera (IU) orthogonally and providing a half mirror (5) between them, adjacent imaging areas (3), (4) However, in this method, the optical signals (S) from the imaging areas (3) and (4) are
l) and (32) are the transmitted light to the ITV camera (1^), the reflected light (L2) to the ITV camera (IB), and the absorbed light absorbed by the half mirror (5) (not shown). There is a problem that the amount of light is reduced as it is dispersed between There is a method of inputting the optical signal (Sl), (32) to the ITV camera (IA) and the ITV camera (IB) to obtain an image. However, with this method, when the camera lenses (2A) and (2B) are smaller than the imaging areas (3) and (4), the amount of light to the ITV camera (IA) and ITV camera (IB) decreases, which is not satisfactory. If an image cannot be obtained and the camera lenses (2A) and (2B) are large, the areas adjacent to the imaging areas (3) and (4) (
7) Since the amount of light decreases, there is a drawback that unevenness in the amount of light occurs in the image.
本発明は上記事情にもとづいてなされたもので。 The present invention has been made based on the above circumstances.
光量むらのない画像が複数の撮像領域から同時に得られ
て、検査に要する時間を短縮させることができる画像入
力装置を提供することを目的とする。It is an object of the present invention to provide an image input device that can simultaneously obtain images without unevenness in light amount from a plurality of imaging areas and shorten the time required for inspection.
[発明の概要〕
本発明は上記目的を達成するために物体の表面に光を照
射する照射手段と、この照射手段により照射された上記
物体からの光信号を複数の方向へ分割する分割手段と、
この分割手段で分割されたそれぞれの光信号を撮像する
撮像装置とを具備し、上記分割手段により分割して撮像
される2つの撮像領域の間隔を撮像領域の面積、形状と
同等、もしくは面積を0.8〜1.0倍に設定しておく
ことにより、従来問題となっていた隣接部における光量
の減少を防止し、光量むらのない画像を得ることができ
るようにしたことを特徴とするものである。[Summary of the Invention] In order to achieve the above object, the present invention includes an irradiation means for irradiating light onto the surface of an object, and a dividing means for dividing the optical signal from the object irradiated by the irradiation means into a plurality of directions. ,
and an imaging device that images each of the optical signals divided by the dividing means, and the interval between the two imaging regions divided and imaged by the dividing means is set to be equal to or smaller than the area or shape of the imaging region. By setting the magnification to 0.8 to 1.0 times, it is possible to prevent the decrease in the amount of light in adjacent areas, which has been a problem in the past, and to obtain an image without unevenness in the amount of light. It is something.
以下、本発明を第1図に示す一実施例にもとづいて説明
する。図中、 (11)はX−Y方向に移動可能なテー
ブルで、このテーブル(11)上に載置される物体、た
とえば被検査物(A)の表面はたとえば、ハロゲン電球
(12)(照射手段)によりほぼ水平方向から均一な照
度で照射されるようになっている。The present invention will be explained below based on an embodiment shown in FIG. In the figure, (11) is a table movable in the X-Y direction, and the surface of an object placed on this table (11), such as the object to be inspected (A), is means), the illuminance is irradiated almost horizontally with uniform illuminance.
そして、上記被検査物(A)を撮像する第1の撮像領域
(13)および第2の撮像領域(14)はいずれも形状
、面積が等しく、かつ第1の撮像領域(13)と第2の
撮像領域(14)との間の間隔領域(15)も形状、面
積が上記撮像領域(13)、または(14)に等しいも
のとする。また、(16)は上記被検査物(A)の上方
に設置されるV字形の反射鏡で、上記ハロゲン電球(1
2)により照射された第1の撮像領域(13)および第
2の撮像領域(14)からの反射光、すなわち光信号(
St)、(S2)は分割手段としての上記反射鏡(16
)により互いに相反する2方向へ分割して反射される。The first imaging region (13) and the second imaging region (14) for imaging the inspection object (A) have the same shape and area, and the first imaging region (13) and the second imaging region (14) have the same shape and area. The interval region (15) between the imaging region (14) and the imaging region (14) is also assumed to have the same shape and area as the imaging region (13) or (14). Further, (16) is a V-shaped reflector installed above the object to be inspected (A);
2), reflected light from the first imaging area (13) and the second imaging area (14) illuminated by the optical signal (
St) and (S2) are the reflecting mirrors (16
), the light is divided and reflected in two opposite directions.
そして、一方の光信号(Sl)はカメラ用レンズ(17
A)ニ入射し、ITVカメラ(18A)ニより第1の撮
像領域(13)の画像が得られ、他方の光信号(S2)
はカメラ用レンズ(17B)に入射し、ITVカメラ(
18B)により第2の撮像領域(14)の画像を得るよ
うに構成されている。One optical signal (Sl) is transmitted to the camera lens (17
A) The image of the first imaging area (13) is obtained from the ITV camera (18A), and the other optical signal (S2)
is incident on the camera lens (17B), and the ITV camera (
18B) to obtain an image of the second imaging area (14).
つぎに、上記構成にもとづく本発明の作用について説明
する。まず、テーブル(11)上に被検査物(A)を載
置し、ハロゲン電球(12)により上記被検査物(A)
の表面に向けてほぼ水平方向からの均一の光を照射する
。すると、第1の撮像領域(13)および第2の撮像領
域(14)からの反射光、すなわち光信号(Sl)およ
び(S2)はV字形反射鏡(16)により相反する2方
向へ反射され、一方の光信号(Sl)はカメラ用レンズ
(17A)に入射してITVカメラ(18A)により画
像が得られ、他方の光信号(S2)はカメラ用レンズ(
17B)に入射してITVカメラ(18B)により画像
を得ることができる。Next, the operation of the present invention based on the above configuration will be explained. First, an object to be inspected (A) is placed on a table (11), and a halogen light bulb (12) is placed on the object to be inspected (A).
irradiates the surface with uniform light from a nearly horizontal direction. Then, the reflected light from the first imaging area (13) and the second imaging area (14), that is, the optical signals (Sl) and (S2), are reflected in two opposite directions by the V-shaped reflecting mirror (16). , one optical signal (Sl) is incident on the camera lens (17A) and an image is obtained by the ITV camera (18A), and the other optical signal (S2) is incident on the camera lens (17A).
17B) and an image can be obtained by an ITV camera (18B).
つぎに、上記テーブル(11)を図示しない移動機構に
より矢印で示すX方向へ距離aだけ移動、すなわち被検
査物(A)を移動させると、第1の撮像領域(13)は
間隔領域(15)の位置まで移動するため、間隔領域(
15)は第2の撮像領域(14)の位置に、第1の撮像
領域(13)に隣接する撮像領域(図示しない)は第1
の撮像領域(13)の位置にそれぞれ位置決めされて新
たな撮像領域となり、光量むらのない画像を同時に得る
ことができる。Next, when the table (11) is moved by a distance a in the direction of ) to the position of the interval area (
15) is located at the position of the second imaging area (14), and an imaging area (not shown) adjacent to the first imaging area (13) is located at the position of the first imaging area (13).
are positioned at the positions of the imaging areas (13), respectively, to form new imaging areas, and images without unevenness in light amount can be obtained at the same time.
仮りに、上記第1の撮像領域(13)と第2の撮像領域
(14)との間の間隔領域(15)が両者それぞれの面
積より小さい場合には上記第1および第2の撮像領域(
13) 、 (14)の画像がITVカメラ(18A)
および(18B)により得られた後、テーブル(11)
を距離aだけ移動、すなわち被検査物(A)を移動させ
ると、間隔領域(15)および第1の撮像領域(13)
、第2の撮像領域(14)の一部が新たな撮像領域とな
り、上記ITVカメラ(18A)および(18B)には
被検査物(A)の複数の画像がオーバーラツプした状態
で入力することとなる。If the interval region (15) between the first imaging region (13) and the second imaging region (14) is smaller than the area of each of them, the first and second imaging regions (14)
13) and (14) images are from ITV camera (18A)
and (18B), then table (11)
When the object to be inspected (A) is moved by a distance a, the interval region (15) and the first imaging region (13)
, a part of the second imaging area (14) becomes a new imaging area, and multiple images of the object to be inspected (A) are input in an overlapping state to the ITV cameras (18A) and (18B). Become.
したがって、本発明は第1の撮像領域(13)と第2の
撮像領域(14)との間の間隔領域(15)を上記第1
および第2の撮像領域(13) 、 (14)と面積、
形状を同一となるよう設定しておくことにより、2つの
撮像領域(13)、 (14)が近接し、ITvカメラ
(18A)、 (18B)のカメラ用レンズ(17A)
、 (17B)が上記撮像領域(13)、(14)よ
りも大きい場合でも画像に光量むらの発生を防止するこ
とができるものである。Therefore, in the present invention, the interval region (15) between the first imaging region (13) and the second imaging region (14) is
and second imaging region (13), (14) and area,
By setting the shapes to be the same, the two imaging areas (13) and (14) are close to each other, and the camera lens (17A) of the ITv camera (18A) and (18B)
, (17B) are larger than the imaging areas (13) and (14), it is possible to prevent uneven light amount from occurring in the image.
上記したように本装置は2つの撮像領域(13)。As mentioned above, this device has two imaging areas (13).
(14)間に設けられている間隔領域(15)の直上に
V字形反射鏡(16)を配置することにより、撮像領域
(13)からの光信号(Sl)および撮像領域(14)
からの光信号(S2)が反射M (IS)で充分に反射
されることがなく、また2つの撮像領域(13) 、
(14)間に設けられている間隔領域(15)の形状1
面積を上記撮像領域(13) 、 (14)と同等に設
定すること←こより、被検査物(A)における複数の画
像を得る場合にもテーブル(11)の移動回数もほぼ半
減し、効率的に検査することができるにこで、上記間隔
領域(15)の間隔が2つの撮像領域(13)、(14
)それぞれの間隔よりも大きい場合には、被検査物(A
)の画像はテーブル(11)を1回移動することにより
1回しか得られず、したがってテーブル(11)の移動
回数が多くなる。また、間隔領域(15)の間隔が2つ
の撮像領域(13) 、 (14)それぞれよりも僅か
小さく、0.8〜1.0倍である場合にはテーブル(1
1)の移動により上記撮像領域(13) 、 (14)
の画像は間隔領域(15)に撮像される新たな画像と一
部オーバーラップするがテーブル(11)など装置の誤
差により許容し得るものである。(14) By arranging a V-shaped reflector (16) directly above the interval region (15) provided in between, the optical signal (Sl) from the imaging region (13) and the imaging region (14)
The optical signal (S2) from is not sufficiently reflected by the reflection M (IS), and the two imaging areas (13),
(14) Shape 1 of the interval area (15) provided between
By setting the area to be equal to the imaging areas (13) and (14) above, the number of times the table (11) is moved can be reduced by almost half even when obtaining multiple images of the inspected object (A), making it more efficient. In this country, the interval between the interval regions (15) is two imaging regions (13) and (14).
), the object to be inspected (A
) can be obtained only once by moving the table (11) once, thus increasing the number of times the table (11) is moved. In addition, if the interval between the interval regions (15) is slightly smaller than each of the two imaging regions (13) and (14), and is 0.8 to 1.0 times, the table (1
By moving 1), the above imaging areas (13) and (14)
The image partially overlaps with the new image captured in the interval area (15), but this is tolerable due to errors in the table (11) and other devices.
以上説明したように本発明によれば光量むらのない画像
が複数の撮像領域から同時に得られるため、物体の表面
領査に要する時間を短縮させることができるという優れ
た効果を奏するものである。As described above, according to the present invention, since images without unevenness in light amount can be obtained simultaneously from a plurality of imaging areas, the present invention has the excellent effect of reducing the time required to scan the surface of an object.
第1図は本発明の一実施例を示す構成図、第2図乃至第
6図はそれぞれ従来例を示す構成図で、第2図は単に2
台のITVカメラをそれぞれの撮像領域の上方に並設し
た画像入力装置の正面図。
第3図は第2図において被検査物が小さく2台のITV
カメラのうち1台は画像が得られない状態を示す画像入
力装置の正面図、第4I!lはハーフミラ−を用いて隣
接する撮像領域から画像を得る画像入力装置の正面図、
第5図はV字形反射鏡を用いて隣接する撮像領域から画
像を得る画像入力装置の正面図、第6図は第5図におい
て、撮像領域の隣接部から光信号が充分得られない状態
を示す画像入力装置の正面図であるや
A・・・被検査物(物体)12・・・ハロゲン電球(照
射手段)13、14・・・撮像領域 15
・・・間隔領域16・・・■字形反射鏡(分割手段)
17A、17B・・・カメラ用レンズ18A、 18
B・I TVカメラ(撮像装置)S1pS2・・・光信
号FIG. 1 is a block diagram showing an embodiment of the present invention, and FIGS. 2 to 6 are block diagrams showing conventional examples, and FIG.
FIG. 2 is a front view of an image input device in which multiple ITV cameras are arranged in parallel above respective imaging areas. Figure 3 shows that the objects to be inspected are smaller than those in Figure 2 and include two ITVs.
Front view of the image input device showing a state in which one of the cameras cannot obtain an image, 4th I! l is a front view of an image input device that obtains images from adjacent imaging areas using a half mirror;
Figure 5 is a front view of an image input device that obtains images from adjacent imaging areas using a V-shaped reflector, and Figure 6 shows a state in which optical signals are not sufficiently obtained from adjacent areas of the imaging area in Figure 5. It is a front view of the image input device shown in FIG.
... Interval area 16 ... ■ Letter-shaped reflecting mirror (dividing means)
17A, 17B...Camera lenses 18A, 18
B・I TV camera (imaging device) S1pS2... optical signal
Claims (4)
手段により照射された上記物体からの光信号を複数の方
向へ分割する分割手段と、この分割手段で分割されたそ
れぞれの光信号を撮像する複数の撮像装置と を具備したことを特徴とする画像入力装置。(1) An irradiating means for irradiating light onto the surface of an object, a dividing means for dividing into multiple directions an optical signal from the object irradiated by the irradiating means, and each optical signal divided by the dividing means. An image input device comprising a plurality of imaging devices that capture images.
を撮像することを特徴とする特許請求の範囲第1項記載
の画像入力装置。(2) The image input device according to claim 1, wherein each of the plurality of image pickup devices images different image pickup areas of the object.
隔領域も上記撮像領域の0.8〜1.0倍の間隔である
ことを特徴とする特許請求の範囲第2項記載の画像入力
装置。(3) Image input according to claim 2, wherein the plurality of imaging regions are all equal in shape and area, and the interval regions are also 0.8 to 1.0 times as large as the imaging regions. Device.
求の範囲第1項記載の画像入力装置。(4) The image input device according to claim 1, wherein the dividing means is a reflecting mirror.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1588886A JPS62176281A (en) | 1986-01-29 | 1986-01-29 | Image input device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1588886A JPS62176281A (en) | 1986-01-29 | 1986-01-29 | Image input device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS62176281A true JPS62176281A (en) | 1987-08-03 |
Family
ID=11901327
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1588886A Pending JPS62176281A (en) | 1986-01-29 | 1986-01-29 | Image input device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS62176281A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009524071A (en) * | 2006-02-10 | 2009-06-25 | アーテーゲー ルーテル ウント メルツァー ゲーエムベーハー | Finger tester for inspection of non-componentized printed circuit boards and method for inspecting non-componentized printed circuit boards with finger testers |
-
1986
- 1986-01-29 JP JP1588886A patent/JPS62176281A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2009524071A (en) * | 2006-02-10 | 2009-06-25 | アーテーゲー ルーテル ウント メルツァー ゲーエムベーハー | Finger tester for inspection of non-componentized printed circuit boards and method for inspecting non-componentized printed circuit boards with finger testers |
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