JPS62175305U - - Google Patents
Info
- Publication number
- JPS62175305U JPS62175305U JP6157886U JP6157886U JPS62175305U JP S62175305 U JPS62175305 U JP S62175305U JP 6157886 U JP6157886 U JP 6157886U JP 6157886 U JP6157886 U JP 6157886U JP S62175305 U JPS62175305 U JP S62175305U
- Authority
- JP
- Japan
- Prior art keywords
- voltage
- comparator
- mass flow
- flow controller
- flow rate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005259 measurement Methods 0.000 claims description 2
- 230000003321 amplification Effects 0.000 claims 1
- 238000003199 nucleic acid amplification method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
Landscapes
- Flow Control (AREA)
Description
第１図は、本考案の回路とマスフローコントロ
ーラのブロツクダイヤグラム、第２図は、従来法
とマスフローコントローラのブロツクダイヤグラ
ムを示す。
１……マスフローコントローラ本体、２……流
量設定電圧、３……流量測定電圧、１５……上下
限設定パネルメータ、２０……可変抵抗、２１…
…比較器、２２……整流回路、２３……直流用リ
レー。
FIG. 1 shows a block diagram of the circuit of the present invention and a mass flow controller, and FIG. 2 shows a block diagram of a conventional method and a mass flow controller. DESCRIPTION OF SYMBOLS 1... Mass flow controller main body, 2... Flow rate setting voltage, 3... Flow rate measurement voltage, 15... Upper and lower limit setting panel meter, 20... Variable resistor, 21...
... Comparator, 22 ... Rectifier circuit, 23 ... DC relay.
Claims (1)
設定電圧と、流量測定電圧との電圧差を増巾する
比較器、及び増巾率を調節する可変抵抗を設け、
かつ前記比較器の出力電圧が、プラス・マイナス
どちらの場合でも、直流用リレーに同方向から電
流が流れる様に整流回路を設けたことを特徴とす
るガス用マスフローコントローラ。 A mass flow controller for gas is provided with a comparator that amplifies the voltage difference between the flow rate setting voltage and the flow rate measurement voltage, and a variable resistor that adjusts the amplification rate.
A gas mass flow controller characterized in that a rectifier circuit is provided so that current flows from the same direction to the DC relay regardless of whether the output voltage of the comparator is positive or negative.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6157886U JPS62175305U (en) | 1986-04-23 | 1986-04-23 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6157886U JPS62175305U (en) | 1986-04-23 | 1986-04-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS62175305U true JPS62175305U (en) | 1987-11-07 |
Family
ID=30895043
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6157886U Pending JPS62175305U (en) | 1986-04-23 | 1986-04-23 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62175305U (en) |
-
1986
- 1986-04-23 JP JP6157886U patent/JPS62175305U/ja active Pending