JPS62174684U - - Google Patents
Info
- Publication number
- JPS62174684U JPS62174684U JP6169186U JP6169186U JPS62174684U JP S62174684 U JPS62174684 U JP S62174684U JP 6169186 U JP6169186 U JP 6169186U JP 6169186 U JP6169186 U JP 6169186U JP S62174684 U JPS62174684 U JP S62174684U
- Authority
- JP
- Japan
- Prior art keywords
- chamber
- cleaning
- cleaning device
- wall
- cleaned
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004140 cleaning Methods 0.000 claims description 17
- 238000005192 partition Methods 0.000 claims description 5
- 238000009434 installation Methods 0.000 claims description 3
- 239000007788 liquid Substances 0.000 claims 3
- 230000002093 peripheral effect Effects 0.000 claims 1
- 238000005086 pumping Methods 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 5
- 238000002360 preparation method Methods 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Landscapes
- Cleaning By Liquid Or Steam (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986061691U JPH0334307Y2 (en:Method) | 1986-04-25 | 1986-04-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1986061691U JPH0334307Y2 (en:Method) | 1986-04-25 | 1986-04-25 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62174684U true JPS62174684U (en:Method) | 1987-11-06 |
| JPH0334307Y2 JPH0334307Y2 (en:Method) | 1991-07-19 |
Family
ID=30895266
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1986061691U Expired JPH0334307Y2 (en:Method) | 1986-04-25 | 1986-04-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0334307Y2 (en:Method) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49119164U (en:Method) * | 1973-02-07 | 1974-10-11 |
-
1986
- 1986-04-25 JP JP1986061691U patent/JPH0334307Y2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS49119164U (en:Method) * | 1973-02-07 | 1974-10-11 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0334307Y2 (en:Method) | 1991-07-19 |
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